All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror

In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A...

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Bibliographic Details
Main Authors: Eunmo Kang, Heejoo Choi, Brandon Hellman, Joshua Rodriguez, Braden Smith, Xianyue Deng, Parker Liu, Ted Liang-Tai Lee, Eric Evans, Yifan Hong, Jiafan Guan, Chuan Luo, Yuzuru Takashima
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/9/1444
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Summary:In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of <inline-formula><math display="inline" xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mn>0.57</mn><mo>°</mo><mrow><mo>(</mo><mi>H</mi><mo>)</mo></mrow><mo> </mo></mrow></semantics></math></inline-formula>by <inline-formula><math display="inline" xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mn>0.23</mn><mo>°</mo><mo> </mo><mrow><mo>(</mo><mi>V</mi><mo>)</mo></mrow></mrow></semantics></math></inline-formula> was achieved with 0.588 fps for scanning 1344 points within the field of view.
ISSN:2072-666X