All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror
In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-09-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/9/1444 |
| _version_ | 1797484676136304640 |
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| author | Eunmo Kang Heejoo Choi Brandon Hellman Joshua Rodriguez Braden Smith Xianyue Deng Parker Liu Ted Liang-Tai Lee Eric Evans Yifan Hong Jiafan Guan Chuan Luo Yuzuru Takashima |
| author_facet | Eunmo Kang Heejoo Choi Brandon Hellman Joshua Rodriguez Braden Smith Xianyue Deng Parker Liu Ted Liang-Tai Lee Eric Evans Yifan Hong Jiafan Guan Chuan Luo Yuzuru Takashima |
| author_sort | Eunmo Kang |
| collection | DOAJ |
| description | In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of <inline-formula><math display="inline" xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mn>0.57</mn><mo>°</mo><mrow><mo>(</mo><mi>H</mi><mo>)</mo></mrow><mo> </mo></mrow></semantics></math></inline-formula>by <inline-formula><math display="inline" xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mn>0.23</mn><mo>°</mo><mo> </mo><mrow><mo>(</mo><mi>V</mi><mo>)</mo></mrow></mrow></semantics></math></inline-formula> was achieved with 0.588 fps for scanning 1344 points within the field of view. |
| first_indexed | 2024-03-09T23:07:49Z |
| format | Article |
| id | doaj.art-660a5a44a6cd420685d7b902f758b5cf |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T23:07:49Z |
| publishDate | 2022-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-660a5a44a6cd420685d7b902f758b5cf2023-11-23T17:49:40ZengMDPI AGMicromachines2072-666X2022-09-01139144410.3390/mi13091444All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS MirrorEunmo Kang0Heejoo Choi1Brandon Hellman2Joshua Rodriguez3Braden Smith4Xianyue Deng5Parker Liu6Ted Liang-Tai Lee7Eric Evans8Yifan Hong9Jiafan Guan10Chuan Luo11Yuzuru Takashima12James C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAJames C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USAIn a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of <inline-formula><math display="inline" xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mn>0.57</mn><mo>°</mo><mrow><mo>(</mo><mi>H</mi><mo>)</mo></mrow><mo> </mo></mrow></semantics></math></inline-formula>by <inline-formula><math display="inline" xmlns="http://www.w3.org/1998/Math/MathML"><semantics><mrow><mn>0.23</mn><mo>°</mo><mo> </mo><mrow><mo>(</mo><mi>V</mi><mo>)</mo></mrow></mrow></semantics></math></inline-formula> was achieved with 0.588 fps for scanning 1344 points within the field of view.https://www.mdpi.com/2072-666X/13/9/1444lidarMEMSdigital micromirror deviceMEMS mirrortime-of-flightsolid-state lidar |
| spellingShingle | Eunmo Kang Heejoo Choi Brandon Hellman Joshua Rodriguez Braden Smith Xianyue Deng Parker Liu Ted Liang-Tai Lee Eric Evans Yifan Hong Jiafan Guan Chuan Luo Yuzuru Takashima All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror Micromachines lidar MEMS digital micromirror device MEMS mirror time-of-flight solid-state lidar |
| title | All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror |
| title_full | All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror |
| title_fullStr | All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror |
| title_full_unstemmed | All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror |
| title_short | All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror |
| title_sort | all mems lidar using hybrid optical architecture with digital micromirror devices and a 2d mems mirror |
| topic | lidar MEMS digital micromirror device MEMS mirror time-of-flight solid-state lidar |
| url | https://www.mdpi.com/2072-666X/13/9/1444 |
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