A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones

A VCO-Based CMOS Readout Circuit for Capacitive MEMS Microphones

Microelectromechanical systems (MEMS) microphone sensors have significantly improved in the past years, while the readout electronic is mainly implemented using switched-capacitor technology. The development of new battery powered “always-on” applications increasingly requires a...

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Bibliographic Details
Main Authors: Andres Quintero, Fernando Cardes, Carlos Perez, Cesare Buffa, Andreas Wiesbauer, Luis Hernandez
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Sensors
Subjects:
MEMS microphone
oscillator-based sensor
sigma-delta modulation
time-domain circuit
VCO-ADC
Online Access:https://www.mdpi.com/1424-8220/19/19/4126

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