Inkjet-Printed Functionalization of CMUT-Based CO<sub>2</sub> Sensors
The trade-off between the functionalization shift of the informative parameters and sensitivity of capacitive micromachined ultrasound transducers (CMUT)-based CO<sub>2</sub> sensors is addressed, and the CMUT surface modification process by thin inkjet-printed polyethyleneimine (PEI) fi...
Main Authors: | Dovydas Barauskas, Donatas Pelenis, Mindaugas Dzikaras, Marius Mikolajunas, Gailius Vanagas, Darius Virzonis |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/22/6/2288 |
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