Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique
The sesquioxide Lu2O3 single crystal has attracted tremendous attention as potential host material for high-power solid-state lasers. As polishing is the terminal process of conventional ultra-precision machining, the quality of polished crystal directly impacts the crucial performance indicators of...
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2021-12-01
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| Series: | Frontiers in Physics |
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| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2021.795639/full |
| _version_ | 1819177974798221312 |
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| author | Chengyuan Yao Wanfu Shen Wanfu Shen Xiaodong Hu Chunguang Hu |
| author_facet | Chengyuan Yao Wanfu Shen Wanfu Shen Xiaodong Hu Chunguang Hu |
| author_sort | Chengyuan Yao |
| collection | DOAJ |
| description | The sesquioxide Lu2O3 single crystal has attracted tremendous attention as potential host material for high-power solid-state lasers. As polishing is the terminal process of conventional ultra-precision machining, the quality of polished crystal directly impacts the crucial performance indicators of optics. The high melting point of Lu2O3 single crystal makes crystal preparation difficult. Therefore, investigations on the surface/subsurface quality inspection of polished Lu2O3 single crystal are scarce. In this paper, we utilize the quasi-Brewster angle technique (qBAT) based on ellipsometry to inspect the quality of polished Lu2O3 single crystal, achieving fast, non-destructive, and high-sensitive surface/subsurface damage assessment. A systematic crystal processing scheme is designed and polished Lu2O3 crystal samples are obtained. To verify the results of qBAT, the surface and subsurface quality are tested using optical profilometer and transmission electron microscope, respectively. The consistency of the test results demonstrates the feasibility, high sensitivity, and accuracy of the qBAT. To our knowledge, this is the first time that the qBAT is applied to investigate the polished surface/subsurface quality of Lu2O3 single crystal. In conclusion, this method provides a powerful approach to the high-precision characterization of the surface/subsurface quality of Lu2O3 single crystal, and has significant potential for material property study and process optimization during ultra-precision machining. |
| first_indexed | 2024-12-22T21:35:11Z |
| format | Article |
| id | doaj.art-66c0fae96760413db44dbd15263b1fa4 |
| institution | Directory Open Access Journal |
| issn | 2296-424X |
| language | English |
| last_indexed | 2024-12-22T21:35:11Z |
| publishDate | 2021-12-01 |
| publisher | Frontiers Media S.A. |
| record_format | Article |
| series | Frontiers in Physics |
| spelling | doaj.art-66c0fae96760413db44dbd15263b1fa42022-12-21T18:11:47ZengFrontiers Media S.A.Frontiers in Physics2296-424X2021-12-01910.3389/fphy.2021.795639795639Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle TechniqueChengyuan Yao0Wanfu Shen1Wanfu Shen2Xiaodong Hu3Chunguang Hu4State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, ChinaState Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, ChinaNanchang Institute for Microtechnology, Tianjin University, Tianjin, ChinaState Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, ChinaState Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, ChinaThe sesquioxide Lu2O3 single crystal has attracted tremendous attention as potential host material for high-power solid-state lasers. As polishing is the terminal process of conventional ultra-precision machining, the quality of polished crystal directly impacts the crucial performance indicators of optics. The high melting point of Lu2O3 single crystal makes crystal preparation difficult. Therefore, investigations on the surface/subsurface quality inspection of polished Lu2O3 single crystal are scarce. In this paper, we utilize the quasi-Brewster angle technique (qBAT) based on ellipsometry to inspect the quality of polished Lu2O3 single crystal, achieving fast, non-destructive, and high-sensitive surface/subsurface damage assessment. A systematic crystal processing scheme is designed and polished Lu2O3 crystal samples are obtained. To verify the results of qBAT, the surface and subsurface quality are tested using optical profilometer and transmission electron microscope, respectively. The consistency of the test results demonstrates the feasibility, high sensitivity, and accuracy of the qBAT. To our knowledge, this is the first time that the qBAT is applied to investigate the polished surface/subsurface quality of Lu2O3 single crystal. In conclusion, this method provides a powerful approach to the high-precision characterization of the surface/subsurface quality of Lu2O3 single crystal, and has significant potential for material property study and process optimization during ultra-precision machining.https://www.frontiersin.org/articles/10.3389/fphy.2021.795639/fullLu2O3 single crystalpolishingsurface damagesubsurface damagequasi-Brewster angle techniqueellipsometry |
| spellingShingle | Chengyuan Yao Wanfu Shen Wanfu Shen Xiaodong Hu Chunguang Hu Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique Frontiers in Physics Lu2O3 single crystal polishing surface damage subsurface damage quasi-Brewster angle technique ellipsometry |
| title | Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique |
| title_full | Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique |
| title_fullStr | Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique |
| title_full_unstemmed | Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique |
| title_short | Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique |
| title_sort | surface and subsurface quality assessment of polished lu2o3 single crystal using quasi brewster angle technique |
| topic | Lu2O3 single crystal polishing surface damage subsurface damage quasi-Brewster angle technique ellipsometry |
| url | https://www.frontiersin.org/articles/10.3389/fphy.2021.795639/full |
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