Artificial intelligence system for technical diagnostics of photomasks
The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to mak...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2012-02-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2012/1_2012/pdf/02.zip |
| _version_ | 1818602755695050752 |
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| author | Kozin A. A. Kozina Yu. Yu. |
| author_facet | Kozin A. A. Kozina Yu. Yu. |
| author_sort | Kozin A. A. |
| collection | DOAJ |
| description | The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to make a small-scale production profitable. |
| first_indexed | 2024-12-16T13:12:19Z |
| format | Article |
| id | doaj.art-66f6226adb6147b58679f57f237585f8 |
| institution | Directory Open Access Journal |
| issn | 2225-5818 |
| language | English |
| last_indexed | 2024-12-16T13:12:19Z |
| publishDate | 2012-02-01 |
| publisher | Politehperiodika |
| record_format | Article |
| series | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| spelling | doaj.art-66f6226adb6147b58679f57f237585f82022-12-21T22:30:35ZengPolitehperiodikaTekhnologiya i Konstruirovanie v Elektronnoi Apparature2225-58182012-02-01179Artificial intelligence system for technical diagnostics of photomasksKozin A. A.Kozina Yu. Yu.The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to make a small-scale production profitable.http://www.tkea.com.ua/tkea/2012/1_2012/pdf/02.zipphotomaskartificial intelligence systemtechnical diagnosticsfiducial marks |
| spellingShingle | Kozin A. A. Kozina Yu. Yu. Artificial intelligence system for technical diagnostics of photomasks Tekhnologiya i Konstruirovanie v Elektronnoi Apparature photomask artificial intelligence system technical diagnostics fiducial marks |
| title | Artificial intelligence system for technical diagnostics of photomasks |
| title_full | Artificial intelligence system for technical diagnostics of photomasks |
| title_fullStr | Artificial intelligence system for technical diagnostics of photomasks |
| title_full_unstemmed | Artificial intelligence system for technical diagnostics of photomasks |
| title_short | Artificial intelligence system for technical diagnostics of photomasks |
| title_sort | artificial intelligence system for technical diagnostics of photomasks |
| topic | photomask artificial intelligence system technical diagnostics fiducial marks |
| url | http://www.tkea.com.ua/tkea/2012/1_2012/pdf/02.zip |
| work_keys_str_mv | AT kozinaa artificialintelligencesystemfortechnicaldiagnosticsofphotomasks AT kozinayuyu artificialintelligencesystemfortechnicaldiagnosticsofphotomasks |