Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines

Microelectromechanical system (MEMS)-based piezoelectric energy harvesting (PEH) devices can convert the mechanical vibrations of their surrounding environment into electrical energy for low-power sensors. This electrical energy is amplified when the operation resonant frequency of the PEH device ma...

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Main Authors: Eustaquio Martínez-Cisneros, Luis A. Velosa-Moncada, Jesús A. Del Angel-Arroyo, Luz Antonio Aguilera-Cortés, Carlos Arturo Cerón-Álvarez, Agustín L. Herrera-May
Format: Article
Language:English
Published: MDPI AG 2020-02-01
Series:Energies
Subjects:
Online Access:https://www.mdpi.com/1996-1073/13/3/617
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author Eustaquio Martínez-Cisneros
Luis A. Velosa-Moncada
Jesús A. Del Angel-Arroyo
Luz Antonio Aguilera-Cortés
Carlos Arturo Cerón-Álvarez
Agustín L. Herrera-May
author_facet Eustaquio Martínez-Cisneros
Luis A. Velosa-Moncada
Jesús A. Del Angel-Arroyo
Luz Antonio Aguilera-Cortés
Carlos Arturo Cerón-Álvarez
Agustín L. Herrera-May
author_sort Eustaquio Martínez-Cisneros
collection DOAJ
description Microelectromechanical system (MEMS)-based piezoelectric energy harvesting (PEH) devices can convert the mechanical vibrations of their surrounding environment into electrical energy for low-power sensors. This electrical energy is amplified when the operation resonant frequency of the PEH device matches with the vibration frequency of its surrounding environment. We present the electromechanical modeling of two MEMS-based PEH devices to transform the mechanical vibrations of domestic washing machines into electrical energy. These devices have resonant structures with a T shape, which are formed by an array of multilayer beams and a ultraviolet (UV)-resin seismic mass. The first layer is a substrate of polyethylene terephthalate (PET), the second and fourth layers are Al and Pt electrodes, and the third layer is piezoelectric material. Two different types of piezoelectric materials (ZnO and PZT-5A) are considered in the designs of PEH devices. The mechanical behavior of each PEH device is obtained using analytical models based on the Rayleigh−Ritz and Macaulay methods, as well as the Euler−Bernoulli beam theory. In addition, finite element method (FEM) models are developed to predict the electromechanical response of the PEH devices. The results of the mechanical behavior of these devices obtained with the analytical models agree well with those of the FEM models. The PEH devices of ZnO and PZT-5A can generate up to 1.97 and 1.35 µW with voltages of 545.32 and 45.10 mV, and load resistances of 151.12 and 1.5 kΩ, respectively. These PEH devices could supply power to internet of things (IoT) sensors of domestic washing machines.
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spelling doaj.art-677cfb5950564c0cacb71182ca25a3412022-12-22T04:23:14ZengMDPI AGEnergies1996-10732020-02-0113361710.3390/en13030617en13030617Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing MachinesEustaquio Martínez-Cisneros0Luis A. Velosa-Moncada1Jesús A. Del Angel-Arroyo2Luz Antonio Aguilera-Cortés3Carlos Arturo Cerón-Álvarez4Agustín L. Herrera-May5Micro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, MexicoMicro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, MexicoMicro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, MexicoDepartamento de Ingeniería Mecánica, DICIS, Universidad de Guanajuato, Carretera Salamanca-Valle de Santiago km 3.5 + 1.8, Salamanca 36885, MexicoFacultad de Ingeniería Eléctrica y Electrónica, Calzada Ruíz Cortines 455, Boca del Río, Veracruz 94294, MexicoMicro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, MexicoMicroelectromechanical system (MEMS)-based piezoelectric energy harvesting (PEH) devices can convert the mechanical vibrations of their surrounding environment into electrical energy for low-power sensors. This electrical energy is amplified when the operation resonant frequency of the PEH device matches with the vibration frequency of its surrounding environment. We present the electromechanical modeling of two MEMS-based PEH devices to transform the mechanical vibrations of domestic washing machines into electrical energy. These devices have resonant structures with a T shape, which are formed by an array of multilayer beams and a ultraviolet (UV)-resin seismic mass. The first layer is a substrate of polyethylene terephthalate (PET), the second and fourth layers are Al and Pt electrodes, and the third layer is piezoelectric material. Two different types of piezoelectric materials (ZnO and PZT-5A) are considered in the designs of PEH devices. The mechanical behavior of each PEH device is obtained using analytical models based on the Rayleigh−Ritz and Macaulay methods, as well as the Euler−Bernoulli beam theory. In addition, finite element method (FEM) models are developed to predict the electromechanical response of the PEH devices. The results of the mechanical behavior of these devices obtained with the analytical models agree well with those of the FEM models. The PEH devices of ZnO and PZT-5A can generate up to 1.97 and 1.35 µW with voltages of 545.32 and 45.10 mV, and load resistances of 151.12 and 1.5 kΩ, respectively. These PEH devices could supply power to internet of things (IoT) sensors of domestic washing machines.https://www.mdpi.com/1996-1073/13/3/617euler–bernoulli beam theorymacaulay methodmechanical vibrationspiezoelectric energy harvestingresonant frequencyrayleigh–ritz methodresonators
spellingShingle Eustaquio Martínez-Cisneros
Luis A. Velosa-Moncada
Jesús A. Del Angel-Arroyo
Luz Antonio Aguilera-Cortés
Carlos Arturo Cerón-Álvarez
Agustín L. Herrera-May
Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines
Energies
euler–bernoulli beam theory
macaulay method
mechanical vibrations
piezoelectric energy harvesting
resonant frequency
rayleigh–ritz method
resonators
title Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines
title_full Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines
title_fullStr Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines
title_full_unstemmed Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines
title_short Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines
title_sort electromechanical modeling of mems based piezoelectric energy harvesting devices for applications in domestic washing machines
topic euler–bernoulli beam theory
macaulay method
mechanical vibrations
piezoelectric energy harvesting
resonant frequency
rayleigh–ritz method
resonators
url https://www.mdpi.com/1996-1073/13/3/617
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