Expanding 3D Nanoprinting Performance by Blurring the Electron Beam

Additive, direct-write manufacturing via a focused electron beam has evolved into a reliable 3D nanoprinting technology in recent years. Aside from low demands on substrate materials and surface morphologies, this technology allows the fabrication of freestanding, 3D architectures with feature sizes...

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Main Authors: Lukas Matthias Seewald, Robert Winkler, Gerald Kothleitner, Harald Plank
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/2/115
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author Lukas Matthias Seewald
Robert Winkler
Gerald Kothleitner
Harald Plank
author_facet Lukas Matthias Seewald
Robert Winkler
Gerald Kothleitner
Harald Plank
author_sort Lukas Matthias Seewald
collection DOAJ
description Additive, direct-write manufacturing via a focused electron beam has evolved into a reliable 3D nanoprinting technology in recent years. Aside from low demands on substrate materials and surface morphologies, this technology allows the fabrication of freestanding, 3D architectures with feature sizes down to the sub-20 nm range. While indispensably needed for some concepts (e.g., 3D nano-plasmonics), the final applications can also be limited due to low mechanical rigidity, and thermal- or electric conductivities. To optimize these properties, without changing the overall 3D architecture, a controlled method for tuning individual branch diameters is desirable. Following this motivation, here, we introduce on-purpose beam blurring for controlled upward scaling and study the behavior at different inclination angles. The study reveals a massive boost in growth efficiencies up to a factor of five and the strong delay of unwanted proximal growth. In doing so, this work expands the design flexibility of this technology.
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spelling doaj.art-67af810dddf3439ea227b67cdc5810762023-12-03T14:18:05ZengMDPI AGMicromachines2072-666X2021-01-0112211510.3390/mi12020115Expanding 3D Nanoprinting Performance by Blurring the Electron BeamLukas Matthias Seewald0Robert Winkler1Gerald Kothleitner2Harald Plank3Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, AustriaChristian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, AustriaGraz Centre for Electron Microscopy, Steyrergasse 17, 8010 Graz, AustriaChristian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes, Institute of Electron Microscopy and Nanoanalysis, Graz University of Technology, 8010 Graz, AustriaAdditive, direct-write manufacturing via a focused electron beam has evolved into a reliable 3D nanoprinting technology in recent years. Aside from low demands on substrate materials and surface morphologies, this technology allows the fabrication of freestanding, 3D architectures with feature sizes down to the sub-20 nm range. While indispensably needed for some concepts (e.g., 3D nano-plasmonics), the final applications can also be limited due to low mechanical rigidity, and thermal- or electric conductivities. To optimize these properties, without changing the overall 3D architecture, a controlled method for tuning individual branch diameters is desirable. Following this motivation, here, we introduce on-purpose beam blurring for controlled upward scaling and study the behavior at different inclination angles. The study reveals a massive boost in growth efficiencies up to a factor of five and the strong delay of unwanted proximal growth. In doing so, this work expands the design flexibility of this technology.https://www.mdpi.com/2072-666X/12/2/1153D-nanoprintingadditive manufacturingdirect-write manufacturingmetallic nanostructureshelicesnanowires
spellingShingle Lukas Matthias Seewald
Robert Winkler
Gerald Kothleitner
Harald Plank
Expanding 3D Nanoprinting Performance by Blurring the Electron Beam
Micromachines
3D-nanoprinting
additive manufacturing
direct-write manufacturing
metallic nanostructures
helices
nanowires
title Expanding 3D Nanoprinting Performance by Blurring the Electron Beam
title_full Expanding 3D Nanoprinting Performance by Blurring the Electron Beam
title_fullStr Expanding 3D Nanoprinting Performance by Blurring the Electron Beam
title_full_unstemmed Expanding 3D Nanoprinting Performance by Blurring the Electron Beam
title_short Expanding 3D Nanoprinting Performance by Blurring the Electron Beam
title_sort expanding 3d nanoprinting performance by blurring the electron beam
topic 3D-nanoprinting
additive manufacturing
direct-write manufacturing
metallic nanostructures
helices
nanowires
url https://www.mdpi.com/2072-666X/12/2/115
work_keys_str_mv AT lukasmatthiasseewald expanding3dnanoprintingperformancebyblurringtheelectronbeam
AT robertwinkler expanding3dnanoprintingperformancebyblurringtheelectronbeam
AT geraldkothleitner expanding3dnanoprintingperformancebyblurringtheelectronbeam
AT haraldplank expanding3dnanoprintingperformancebyblurringtheelectronbeam