Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array
We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2011-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/11/11/10940/ |
| _version_ | 1798038903706353664 |
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| author | Blanca Cervantes-Sanchez Blanca S. Soto-Cruz Enrique Soto Carlos Zuñiga-Islas Johan J. Estrada-López Francisco López-Huerta Agustín L. Herrera-May |
| author_facet | Blanca Cervantes-Sanchez Blanca S. Soto-Cruz Enrique Soto Carlos Zuñiga-Islas Johan J. Estrada-López Francisco López-Huerta Agustín L. Herrera-May |
| author_sort | Blanca Cervantes-Sanchez |
| collection | DOAJ |
| description | We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 µm CMOS standard process and it has 12 pMEA through a 4 ´ 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p+-type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm2 silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications. |
| first_indexed | 2024-04-11T21:46:42Z |
| format | Article |
| id | doaj.art-67c0dfaf26a247a6b9693c3e865b78b8 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T21:46:42Z |
| publishDate | 2011-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-67c0dfaf26a247a6b9693c3e865b78b82022-12-22T04:01:24ZengMDPI AGSensors1424-82202011-11-011111109401095710.3390/s111110940Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode ArrayBlanca Cervantes-SanchezBlanca S. Soto-CruzEnrique SotoCarlos Zuñiga-IslasJohan J. Estrada-LópezFrancisco López-HuertaAgustín L. Herrera-MayWe present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 µm CMOS standard process and it has 12 pMEA through a 4 ´ 3 electrodes matrix. The alternative CMOS post-process includes the development of masks to protect the readout circuit and the power supply pads. A wet etching process eliminates the aluminum located on the surface of the p+-type silicon. This silicon is used as transducer for recording the neuronal activity and as interface between the readout circuit and neurons. The readout circuit is composed of an amplifier and tunable bandpass filter, which is placed on a 0.015 mm2 silicon area. The tunable bandpass filter has a bandwidth of 98 kHz and a common mode rejection ratio (CMRR) of 87 dB. These characteristics of the readout circuit are appropriate for neuronal recording applications.http://www.mdpi.com/1424-8220/11/11/10940/CMOS chipmicroelectrode arrayCMOS post-processvestibular ganglion neurons |
| spellingShingle | Blanca Cervantes-Sanchez Blanca S. Soto-Cruz Enrique Soto Carlos Zuñiga-Islas Johan J. Estrada-López Francisco López-Huerta Agustín L. Herrera-May Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array Sensors CMOS chip microelectrode array CMOS post-process vestibular ganglion neurons |
| title | Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array |
| title_full | Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array |
| title_fullStr | Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array |
| title_full_unstemmed | Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array |
| title_short | Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array |
| title_sort | alternative post processing on a cmos chip to fabricate a planar microelectrode array |
| topic | CMOS chip microelectrode array CMOS post-process vestibular ganglion neurons |
| url | http://www.mdpi.com/1424-8220/11/11/10940/ |
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