Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process

Development of MEMS Multi-Mode Electrostatic Energy Harvester Based on the SOI Process

Multi-vibrational-mode electrostatic energy harvesters are designed and micro-machined utilizing a simple silicon-on-insulator (SOI) wafer-based process. Enhanced adaptability to various vibrational environments is achieved in the proposed design by using serpentine springs attached to the fishbone-...

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Bibliographic Details
Main Authors: Bongwon Jeong, Min-Ook Kim, Jae-Ik Lee, Youngkee Eun, Jungwook Choi, Jongbaeg Kim
Format: Article
Language:English
Published: MDPI AG 2017-02-01
Series:Micromachines
Subjects:
energy harvester
micro-electromechanical systems (MEMS)
kinetic energy transduction
multi-mode system
Online Access:http://www.mdpi.com/2072-666X/8/2/51

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