Partial Parabolic Single Layer Crossing for Silicon-on-Insulator Nanophotonic Waveguides

Under the dimension of 6 µm overall length, a 220 nm partial parabolic taper fabricated on silicon-on-insulator (SOI) wafer with 2 µm buried oxide at 1.55 µm, to simply fabrication processes and reduce cost, we design a Partial parabolic single layer crossing, which...

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Bibliographic Details
Main Authors: Yuan-Ting Shih, Kuo-Fang Chung, Ding-Wei Huang
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9718139/