Examination of smooth surfaces roughness using angle scatterometer. Part 1. The method of measurement. The measurement instrument
The basic parameters of surface roughness are described in this article. The method of calculation of these parameters from measurement of BSDF function characterizing scatter from surface is shown. Automated angle scatterometer, built at the Institute of Optoelectronics of the Military University o...
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| Format: | Article |
| Language: | English |
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Military University of Technology, Warsaw
2015-03-01
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| Series: | Biuletyn Wojskowej Akademii Technicznej |
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| Online Access: | http://biuletynwat.pl/icid/1145426 |
| _version_ | 1797762194441502720 |
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| author | Andrzej Pawlata |
| author_facet | Andrzej Pawlata |
| author_sort | Andrzej Pawlata |
| collection | DOAJ |
| description | The basic parameters of surface roughness are described in this article. The method of calculation of these parameters from measurement of BSDF function characterizing scatter from surface is shown. Automated angle scatterometer, built at the Institute of Optoelectronics of the Military University of Technology (IOE MUT), used for measurements of above parameters is described.[b]Keywords[/b]: surface roughness, scattering, BSDF function, scatterometer |
| first_indexed | 2024-03-12T19:24:47Z |
| format | Article |
| id | doaj.art-686629926c394a4e9d93c0a3450b7e19 |
| institution | Directory Open Access Journal |
| issn | 1234-5865 |
| language | English |
| last_indexed | 2024-03-12T19:24:47Z |
| publishDate | 2015-03-01 |
| publisher | Military University of Technology, Warsaw |
| record_format | Article |
| series | Biuletyn Wojskowej Akademii Technicznej |
| spelling | doaj.art-686629926c394a4e9d93c0a3450b7e192023-08-02T04:56:50ZengMilitary University of Technology, WarsawBiuletyn Wojskowej Akademii Technicznej1234-58652015-03-01641475810.5604/12345865.11454261145426Examination of smooth surfaces roughness using angle scatterometer. Part 1. The method of measurement. The measurement instrumentAndrzej Pawlata0Wojskowa Akademia Techniczna, Instytut Optoelektroniki, 00-908 Warszawa, ul. Kaliskiego 2The basic parameters of surface roughness are described in this article. The method of calculation of these parameters from measurement of BSDF function characterizing scatter from surface is shown. Automated angle scatterometer, built at the Institute of Optoelectronics of the Military University of Technology (IOE MUT), used for measurements of above parameters is described.[b]Keywords[/b]: surface roughness, scattering, BSDF function, scatterometerhttp://biuletynwat.pl/icid/1145426surface roughnessscatteringBSDF functionscatterometer |
| spellingShingle | Andrzej Pawlata Examination of smooth surfaces roughness using angle scatterometer. Part 1. The method of measurement. The measurement instrument Biuletyn Wojskowej Akademii Technicznej surface roughness scattering BSDF function scatterometer |
| title | Examination of smooth surfaces roughness using angle scatterometer.
Part 1. The method of measurement. The measurement instrument |
| title_full | Examination of smooth surfaces roughness using angle scatterometer.
Part 1. The method of measurement. The measurement instrument |
| title_fullStr | Examination of smooth surfaces roughness using angle scatterometer.
Part 1. The method of measurement. The measurement instrument |
| title_full_unstemmed | Examination of smooth surfaces roughness using angle scatterometer.
Part 1. The method of measurement. The measurement instrument |
| title_short | Examination of smooth surfaces roughness using angle scatterometer.
Part 1. The method of measurement. The measurement instrument |
| title_sort | examination of smooth surfaces roughness using angle scatterometer part 1 the method of measurement the measurement instrument |
| topic | surface roughness scattering BSDF function scatterometer |
| url | http://biuletynwat.pl/icid/1145426 |
| work_keys_str_mv | AT andrzejpawlata examinationofsmoothsurfacesroughnessusinganglescatterometerpart1themethodofmeasurementthemeasurementinstrument |