Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition

Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in it...

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Main Authors: Jakub Jurczyk, Katja Höflich, Katarzyna Madajska, Luisa Berger, Leo Brockhuis, Thomas Edward James Edwards, Czesław Kapusta, Iwona B. Szymańska, Ivo Utke
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/13/9/1516
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author Jakub Jurczyk
Katja Höflich
Katarzyna Madajska
Luisa Berger
Leo Brockhuis
Thomas Edward James Edwards
Czesław Kapusta
Iwona B. Szymańska
Ivo Utke
author_facet Jakub Jurczyk
Katja Höflich
Katarzyna Madajska
Luisa Berger
Leo Brockhuis
Thomas Edward James Edwards
Czesław Kapusta
Iwona B. Szymańska
Ivo Utke
author_sort Jakub Jurczyk
collection DOAJ
description Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we examine and compare five different silver carboxylates, three perfluorinated: [Ag<sub>2</sub>(µ-O<sub>2</sub>CCF<sub>3</sub>)<sub>2</sub>], [Ag<sub>2</sub>(µ-O<sub>2</sub>CC<sub>2</sub>F<sub>5</sub>)<sub>2</sub>], and [Ag<sub>2</sub>(µ-O<sub>2</sub>CC<sub>3</sub>F<sub>7</sub>)<sub>2</sub>], and two containing branched substituents: [Ag<sub>2</sub>(µ-O<sub>2</sub>CCMe<sub>2</sub>Et)<sub>2</sub>] and [Ag<sub>2</sub>(µ-O<sub>2</sub>C<sup>t</sup>Bu)<sub>2</sub>], as potential precursors for focused electron-beam-induced deposition. All of the compounds show high sensitivity to electron dissociation and efficient dissociation of Ag-O bonds. The as-deposited materials have silver contents from 42 at.% to above 70 at.% and are composed of silver nano-crystals with impurities of carbon and fluorine between them. Precursors with the shortest carbon-fluorine chain ligands yield the highest silver contents. In addition, the deposited silver content depends on the balance of electron-induced ligand co-deposition and ligand desorption. For all of the tested compounds, low electron flux was related to high silver content. Our findings demonstrate that silver carboxylates constitute a promising group of precursors for gas-assisted focused electron beam writing of high silver content materials.
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spelling doaj.art-688a22bc3119409f9ee857e89b9bcc082023-11-17T23:27:07ZengMDPI AGNanomaterials2079-49912023-04-01139151610.3390/nano13091516Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced DepositionJakub Jurczyk0Katja Höflich1Katarzyna Madajska2Luisa Berger3Leo Brockhuis4Thomas Edward James Edwards5Czesław Kapusta6Iwona B. Szymańska7Ivo Utke8Laboratory for Mechanics of Materials and Nanostructures, Empa—Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandHelmholtz-Zentrum Berlin Für Materialien und Energie, Nanoscale Structures and Microscopic Analysis, Hahn-Meitner-Platz 1, 14109 Berlin, GermanyFaculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, PolandLaboratory for Mechanics of Materials and Nanostructures, Empa—Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandLaboratory for Mechanics of Materials and Nanostructures, Empa—Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandLaboratory for Mechanics of Materials and Nanostructures, Empa—Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandFaculty of Physics and Applied Computer Science, AGH University of Krakow Al. Mickiewicza 30, 30-059 Kraków, PolandFaculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, PolandLaboratory for Mechanics of Materials and Nanostructures, Empa—Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, SwitzerlandGas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we examine and compare five different silver carboxylates, three perfluorinated: [Ag<sub>2</sub>(µ-O<sub>2</sub>CCF<sub>3</sub>)<sub>2</sub>], [Ag<sub>2</sub>(µ-O<sub>2</sub>CC<sub>2</sub>F<sub>5</sub>)<sub>2</sub>], and [Ag<sub>2</sub>(µ-O<sub>2</sub>CC<sub>3</sub>F<sub>7</sub>)<sub>2</sub>], and two containing branched substituents: [Ag<sub>2</sub>(µ-O<sub>2</sub>CCMe<sub>2</sub>Et)<sub>2</sub>] and [Ag<sub>2</sub>(µ-O<sub>2</sub>C<sup>t</sup>Bu)<sub>2</sub>], as potential precursors for focused electron-beam-induced deposition. All of the compounds show high sensitivity to electron dissociation and efficient dissociation of Ag-O bonds. The as-deposited materials have silver contents from 42 at.% to above 70 at.% and are composed of silver nano-crystals with impurities of carbon and fluorine between them. Precursors with the shortest carbon-fluorine chain ligands yield the highest silver contents. In addition, the deposited silver content depends on the balance of electron-induced ligand co-deposition and ligand desorption. For all of the tested compounds, low electron flux was related to high silver content. Our findings demonstrate that silver carboxylates constitute a promising group of precursors for gas-assisted focused electron beam writing of high silver content materials.https://www.mdpi.com/2079-4991/13/9/1516FEBIDnanoprintingsilver carboxylates
spellingShingle Jakub Jurczyk
Katja Höflich
Katarzyna Madajska
Luisa Berger
Leo Brockhuis
Thomas Edward James Edwards
Czesław Kapusta
Iwona B. Szymańska
Ivo Utke
Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
Nanomaterials
FEBID
nanoprinting
silver carboxylates
title Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
title_full Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
title_fullStr Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
title_full_unstemmed Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
title_short Ligand Size and Carbon-Chain Length Study of Silver Carboxylates in Focused Electron-Beam-Induced Deposition
title_sort ligand size and carbon chain length study of silver carboxylates in focused electron beam induced deposition
topic FEBID
nanoprinting
silver carboxylates
url https://www.mdpi.com/2079-4991/13/9/1516
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