Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements
Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip g...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-02-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/3/1298 |
| _version_ | 1797484543276482560 |
|---|---|
| author | Min Xu Ziqi Zhou Thomas Ahbe Erwin Peiner Uwe Brand |
| author_facet | Min Xu Ziqi Zhou Thomas Ahbe Erwin Peiner Uwe Brand |
| author_sort | Min Xu |
| collection | DOAJ |
| description | Given their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the tip geometry from the measured profile was introduced. Experiments were conducted to explore the ways in which the tip geometry is influenced by tip wear, probing force, and the relative movement of the tip with respect to the sample. The results indicate that tip fracture and not tip wear is the main reason for tip volume loss, and that the lateral dynamic load on the tip during scanning mode is responsible for more tip fracture than are other factors. |
| first_indexed | 2024-03-09T23:05:52Z |
| format | Article |
| id | doaj.art-69255051606b4e3b8a12a68042401172 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T23:05:52Z |
| publishDate | 2022-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-69255051606b4e3b8a12a680424011722023-11-23T17:53:41ZengMDPI AGSensors1424-82202022-02-01223129810.3390/s22031298Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness MeasurementsMin Xu0Ziqi Zhou1Thomas Ahbe2Erwin Peiner3Uwe Brand4Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanyInstitute of Production Measurement Technology (IPROM), Technische Universität Braunschweig, Schleinitzstraße 20, 38106 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanyGiven their superior dynamics, microprobes represent promising probe candidates for high-speed roughness measurement applications. Their disadvantage, however, lies in the fact that the volume of the microprobe’s silicon tip decreases dramatically during roughness measurement, and the unstable tip geometry leads to an increase in measurement uncertainty. To investigate the factors that influence tip geometry variation during roughness measurement, a rectangular-shaped tip characterizer was employed to characterize the tip geometry, and a method for reconstructing the tip geometry from the measured profile was introduced. Experiments were conducted to explore the ways in which the tip geometry is influenced by tip wear, probing force, and the relative movement of the tip with respect to the sample. The results indicate that tip fracture and not tip wear is the main reason for tip volume loss, and that the lateral dynamic load on the tip during scanning mode is responsible for more tip fracture than are other factors.https://www.mdpi.com/1424-8220/22/3/1298roughness measurementpiezoresistive microprobesilicon fracturetip characterization |
| spellingShingle | Min Xu Ziqi Zhou Thomas Ahbe Erwin Peiner Uwe Brand Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements Sensors roughness measurement piezoresistive microprobe silicon fracture tip characterization |
| title | Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements |
| title_full | Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements |
| title_fullStr | Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements |
| title_full_unstemmed | Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements |
| title_short | Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements |
| title_sort | using a tip characterizer to investigate microprobe silicon tip geometry variation in roughness measurements |
| topic | roughness measurement piezoresistive microprobe silicon fracture tip characterization |
| url | https://www.mdpi.com/1424-8220/22/3/1298 |
| work_keys_str_mv | AT minxu usingatipcharacterizertoinvestigatemicroprobesilicontipgeometryvariationinroughnessmeasurements AT ziqizhou usingatipcharacterizertoinvestigatemicroprobesilicontipgeometryvariationinroughnessmeasurements AT thomasahbe usingatipcharacterizertoinvestigatemicroprobesilicontipgeometryvariationinroughnessmeasurements AT erwinpeiner usingatipcharacterizertoinvestigatemicroprobesilicontipgeometryvariationinroughnessmeasurements AT uwebrand usingatipcharacterizertoinvestigatemicroprobesilicontipgeometryvariationinroughnessmeasurements |