Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic f...

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Bibliographic Details
Main Authors: Agustín Leobardo Herrera-May, Juan Carlos Soler-Balcazar, Héctor Vázquez-Leal, Jaime Martínez-Castillo, Marco Osvaldo Vigueras-Zuñiga, Luz Antonio Aguilera-Cortés
Format: Article
Language:English
Published: MDPI AG 2016-08-01
Series:Sensors
Subjects:
Lorentz force
magnetic field sensor
MEMS
resonators
sensing technique
Online Access:http://www.mdpi.com/1424-8220/16/9/1359

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