Focused solar annealing for block copolymer fast self-assembly

Focused solar annealing for block copolymer fast self-assembly

Block copolymer (BCP) self-assembly has tremendous potential applications in next-generation nanolithography. It offers significant advantages, including high resolution and cost-effectiveness, effectively overcoming the limitations associated with conventional optical lithography. In this work, we...

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Bibliographic Details
Main Authors: Xiao-Hua Hu, Rui Zhang, Xiaohui Zhang, Zhiyong Wu, Jing Zhou, Weihua Li, Shisheng Xiong
Format: Article
Language:English
Published: Elsevier 2024-01-01
Series:Heliyon
Subjects:
Block copolymer
Fast self-assembly
Focused solar annealing
Contact hole shrinking
Contact hole multiplication
Carbon neutrality
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844024000471

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http://www.sciencedirect.com/science/article/pii/S2405844024000471

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