Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer
This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is t...
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| Format: | Article |
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MDPI AG
2017-08-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/17/8/1765 |
| _version_ | 1798005674380099584 |
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| author | Maeum Han Jae Keon Kim Jin-Hyoung Park Woojin Kim Shin-Won Kang Seong Ho Kong Daewoong Jung |
| author_facet | Maeum Han Jae Keon Kim Jin-Hyoung Park Woojin Kim Shin-Won Kang Seong Ho Kong Daewoong Jung |
| author_sort | Maeum Han |
| collection | DOAJ |
| description | This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is the thermal convection of a gas medium, a simple model is proposed and developed in which the performance of the thermal convection–based accelerometer is closely associated with the Grashof number, Gr and the Prandtl number, Pr. This paper discusses the experiments that were performed by varying several parameters such as the heating power, cavity size, gas media, and air pressure. The experimental results demonstrate that an increase in the heating power, pressure, and cavity size leads to an increase in the accelerometer sensitivity. However, an increase in the pressure and/or cavity size results in a decrease in the frequency bandwidth. This paper also discusses the fact that a working-gas medium with a large thermal diffusivity and small kinematic viscosity can widen the frequency bandwidth and increase the sensitivity, respectively. |
| first_indexed | 2024-04-11T12:43:06Z |
| format | Article |
| id | doaj.art-6af99ff020824b83ac2b4c959b4d6369 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T12:43:06Z |
| publishDate | 2017-08-01 |
| publisher | MDPI AG |
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| series | Sensors |
| spelling | doaj.art-6af99ff020824b83ac2b4c959b4d63692022-12-22T04:23:26ZengMDPI AGSensors1424-82202017-08-01178176510.3390/s17081765s17081765Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based AccelerometerMaeum Han0Jae Keon Kim1Jin-Hyoung Park2Woojin Kim3Shin-Won Kang4Seong Ho Kong5Daewoong Jung6School of Electronics Engineering, College of IT Engineering, Kyungpook National University, Daegu 41566, KoreaDepartment of Sensor and Display Engineering, Kyungpook National University, Daegu 41566, KoreaConstruction Equipment R&D Group, Korea Institute of Industrial Technology (KITECH), Daegu 42994, KoreaMechatronics Technology Convergence R&D Group, Korea Institute of Industrial Technology (KITECH), Daegu 42994, KoreaSchool of Electronics Engineering, College of IT Engineering, Kyungpook National University, Daegu 41566, KoreaSchool of Electronics Engineering, College of IT Engineering, Kyungpook National University, Daegu 41566, KoreaAircraft System Technology Group, Korea Institute of Industrial Technology (KITECH), Daegu 42994, KoreaThis paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is the thermal convection of a gas medium, a simple model is proposed and developed in which the performance of the thermal convection–based accelerometer is closely associated with the Grashof number, Gr and the Prandtl number, Pr. This paper discusses the experiments that were performed by varying several parameters such as the heating power, cavity size, gas media, and air pressure. The experimental results demonstrate that an increase in the heating power, pressure, and cavity size leads to an increase in the accelerometer sensitivity. However, an increase in the pressure and/or cavity size results in a decrease in the frequency bandwidth. This paper also discusses the fact that a working-gas medium with a large thermal diffusivity and small kinematic viscosity can widen the frequency bandwidth and increase the sensitivity, respectively.https://www.mdpi.com/1424-8220/17/8/1765accelerometerfrequencyaccelerationheat convection |
| spellingShingle | Maeum Han Jae Keon Kim Jin-Hyoung Park Woojin Kim Shin-Won Kang Seong Ho Kong Daewoong Jung Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer Sensors accelerometer frequency acceleration heat convection |
| title | Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer |
| title_full | Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer |
| title_fullStr | Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer |
| title_full_unstemmed | Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer |
| title_short | Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer |
| title_sort | sensitivity and frequency response improvement of a thermal convection based accelerometer |
| topic | accelerometer frequency acceleration heat convection |
| url | https://www.mdpi.com/1424-8220/17/8/1765 |
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