Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch
A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper...
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| Format: | Article |
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MDPI AG
2018-01-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/18/1/242 |
| _version_ | 1818038474572300288 |
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| author | Fei Lu Haixing Wang Yanjie Guo Qiulin Tan Wendong Zhang Jijun Xiong |
| author_facet | Fei Lu Haixing Wang Yanjie Guo Qiulin Tan Wendong Zhang Jijun Xiong |
| author_sort | Fei Lu |
| collection | DOAJ |
| description | A wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper, the proposed high temperature sensor was designed, fabricated, and characterized. Here the 99% alumina ceramic with a dimension of 40 mm × 40 mm × 1 mm was prepared in micromechanics for fabrication of the sensor substrate. The metallization of the Au slot patch was realized in magnetron sputtering with a slot width of 2 mm and a slot length of 32 mm. The measured resonant frequency of the sensor at 25 °C is 2.31 GHz. It was concluded that the resonant frequency decreases with the increase in the temperature in range of 25–800 °C. It was shown that the average sensor sensitivity is 101.94 kHz/°C. |
| first_indexed | 2024-12-10T07:43:19Z |
| format | Article |
| id | doaj.art-6b8d8c2bdddc471791a9e5186026cfe6 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-12-10T07:43:19Z |
| publishDate | 2018-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-6b8d8c2bdddc471791a9e5186026cfe62022-12-22T01:57:14ZengMDPI AGSensors1424-82202018-01-0118124210.3390/s18010242s18010242Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation PatchFei Lu0Haixing Wang1Yanjie Guo2Qiulin Tan3Wendong Zhang4Jijun Xiong5Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, ChinaA wireless and passive temperature sensor operating up to 800 °C is proposed. The sensor is based on microwave backscatter RFID (radio frequency identification) technology. A thin-film planar structure and simple working principle make the sensor easy to operate under high temperature. In this paper, the proposed high temperature sensor was designed, fabricated, and characterized. Here the 99% alumina ceramic with a dimension of 40 mm × 40 mm × 1 mm was prepared in micromechanics for fabrication of the sensor substrate. The metallization of the Au slot patch was realized in magnetron sputtering with a slot width of 2 mm and a slot length of 32 mm. The measured resonant frequency of the sensor at 25 °C is 2.31 GHz. It was concluded that the resonant frequency decreases with the increase in the temperature in range of 25–800 °C. It was shown that the average sensor sensitivity is 101.94 kHz/°C.http://www.mdpi.com/1424-8220/18/1/242wireless temperature sensormicrowave backscatterslot radiation patchRFID tagsresonant frequency |
| spellingShingle | Fei Lu Haixing Wang Yanjie Guo Qiulin Tan Wendong Zhang Jijun Xiong Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch Sensors wireless temperature sensor microwave backscatter slot radiation patch RFID tags resonant frequency |
| title | Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch |
| title_full | Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch |
| title_fullStr | Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch |
| title_full_unstemmed | Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch |
| title_short | Microwave Backscatter-Based Wireless Temperature Sensor Fabricated by an Alumina-Backed Au Slot Radiation Patch |
| title_sort | microwave backscatter based wireless temperature sensor fabricated by an alumina backed au slot radiation patch |
| topic | wireless temperature sensor microwave backscatter slot radiation patch RFID tags resonant frequency |
| url | http://www.mdpi.com/1424-8220/18/1/242 |
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