Effect of the Graded Silicon Content in SRN/SRO Multilayer Structures on the Si Nanocrystals and Si Nanopyramids Formation and Their Photoluminescence Response

Effect of the Graded Silicon Content in SRN/SRO Multilayer Structures on the Si Nanocrystals and Si Nanopyramids Formation and Their Photoluminescence Response

Two multilayer (ML) structures, composed of five layers of silicon-rich oxide (SRO) with different Si contents and a sixth layer of silicon-rich nitride (SRN), were deposited by low pressure chemical vapor deposition. These SRN/SRO MLs were thermally annealed at 1100 °C for 180 min in ambient N<s...

Full description

Bibliographic Details
Main Authors: José Juan Avilés Bravo, Santiago Antonio Cabañas Tay, Liliana Palacios Huerta, Karla Esther González Flores, Javier Flores Méndez, Mario Moreno Moreno, Alfredo Morales Sánchez
Format: Article
Language:English
Published: MDPI AG 2021-11-01
Series:Materials
Subjects:
graded SRN/SRO multilayer
Si-nanocrystals
Si-nanopyramids
photoluminescence
LPCVD
Online Access:https://www.mdpi.com/1996-1944/14/21/6582

Similar Items

Similar Items