Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment

In the scope of miniaturized optical sensors for liquid refractometry, this work details the design, numerical simulation, and experimental characterization of a Fabry-Pérot resonator consisting of two deeply-etched silicon cylindrical mirrors with a micro-tube in between holding the liquid analyte...

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Main Authors: Noha Gaber, Yasser M. Sabry, Frédéric Marty, Tarik Bourouina
Format: Article
Language:English
Published: MDPI AG 2016-04-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/7/4/62
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author Noha Gaber
Yasser M. Sabry
Frédéric Marty
Tarik Bourouina
author_facet Noha Gaber
Yasser M. Sabry
Frédéric Marty
Tarik Bourouina
author_sort Noha Gaber
collection DOAJ
description In the scope of miniaturized optical sensors for liquid refractometry, this work details the design, numerical simulation, and experimental characterization of a Fabry-Pérot resonator consisting of two deeply-etched silicon cylindrical mirrors with a micro-tube in between holding the liquid analyte under study. The curved surfaces of the tube and the cylindrical mirrors provide three-dimensional light confinement and enable achieving stability for the cavity illuminated by a Gaussian beam input. The resonant optofluidic cavity attains a high-quality factor (Q)—over 2800—which is necessary for a sensitive refractometer, not only by providing a sharp interference spectrum peak that enables accurate tracing of the peak wavelengths shifts, but also by providing steep side peaks, which enables detection of refractive index changes by power level variations when operating at a fixed wavelength. The latter method can achieve refractometry without the need for spectroscopy tools, provided certain criteria explained in the details are met. By experimentally measuring mixtures of acetone-toluene with different ratios, refractive index variations of 0.0005 < Δn < 0.0022 could be detected, with sensitivity as high as 5500 μW/RIU.
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spelling doaj.art-6ca321cefbac4dd6a971318f53d8220b2022-12-21T18:56:25ZengMDPI AGMicromachines2072-666X2016-04-01746210.3390/mi7040062mi7040062Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance AssessmentNoha Gaber0Yasser M. Sabry1Frédéric Marty2Tarik Bourouina3Laboratoire Electronique, Systèmes de Communication et Microsystèmes, Université Paris-Est, ESIEE Paris, ESYCOM EA 2552, 93162 Noisy-le-Grand, FranceElectronics and Electrical Communication Engineering, Faculty of Engineering, Ain-Shams University, 1 Elsarayat St., Abbassia, Cairo 11517, EgyptLaboratoire Electronique, Systèmes de Communication et Microsystèmes, Université Paris-Est, ESIEE Paris, ESYCOM EA 2552, 93162 Noisy-le-Grand, FranceLaboratoire Electronique, Systèmes de Communication et Microsystèmes, Université Paris-Est, ESIEE Paris, ESYCOM EA 2552, 93162 Noisy-le-Grand, FranceIn the scope of miniaturized optical sensors for liquid refractometry, this work details the design, numerical simulation, and experimental characterization of a Fabry-Pérot resonator consisting of two deeply-etched silicon cylindrical mirrors with a micro-tube in between holding the liquid analyte under study. The curved surfaces of the tube and the cylindrical mirrors provide three-dimensional light confinement and enable achieving stability for the cavity illuminated by a Gaussian beam input. The resonant optofluidic cavity attains a high-quality factor (Q)—over 2800—which is necessary for a sensitive refractometer, not only by providing a sharp interference spectrum peak that enables accurate tracing of the peak wavelengths shifts, but also by providing steep side peaks, which enables detection of refractive index changes by power level variations when operating at a fixed wavelength. The latter method can achieve refractometry without the need for spectroscopy tools, provided certain criteria explained in the details are met. By experimentally measuring mixtures of acetone-toluene with different ratios, refractive index variations of 0.0005 < Δn < 0.0022 could be detected, with sensitivity as high as 5500 μW/RIU.http://www.mdpi.com/2072-666X/7/4/62Fabry-Pérot cavityoptical resonatoroptofluidic sensoron-chip refractometerrefractive index measurementlab-on-a-chip
spellingShingle Noha Gaber
Yasser M. Sabry
Frédéric Marty
Tarik Bourouina
Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment
Micromachines
Fabry-Pérot cavity
optical resonator
optofluidic sensor
on-chip refractometer
refractive index measurement
lab-on-a-chip
title Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment
title_full Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment
title_fullStr Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment
title_full_unstemmed Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment
title_short Optofluidic Fabry-Pérot Micro-Cavities Comprising Curved Surfaces for Homogeneous Liquid Refractometry—Design, Simulation, and Experimental Performance Assessment
title_sort optofluidic fabry perot micro cavities comprising curved surfaces for homogeneous liquid refractometry design simulation and experimental performance assessment
topic Fabry-Pérot cavity
optical resonator
optofluidic sensor
on-chip refractometer
refractive index measurement
lab-on-a-chip
url http://www.mdpi.com/2072-666X/7/4/62
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AT yassermsabry optofluidicfabryperotmicrocavitiescomprisingcurvedsurfacesforhomogeneousliquidrefractometrydesignsimulationandexperimentalperformanceassessment
AT fredericmarty optofluidicfabryperotmicrocavitiescomprisingcurvedsurfacesforhomogeneousliquidrefractometrydesignsimulationandexperimentalperformanceassessment
AT tarikbourouina optofluidicfabryperotmicrocavitiescomprisingcurvedsurfacesforhomogeneousliquidrefractometrydesignsimulationandexperimentalperformanceassessment