Development of a Novel 2-DOF Rotary–Linear Piezoelectric Actuator Operating under Hybrid Bending–Radial Vibration Mode
The paper presents a numerical and experimental investigation of a novel two degrees of freedom (2-DOF) piezoelectric actuator that can generate rotary motion of the sphere-shaped rotor as well as induce planar motion of the flat stage. The actuator has a small size and simple design and can be inte...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/6/728 |
| Summary: | The paper presents a numerical and experimental investigation of a novel two degrees of freedom (2-DOF) piezoelectric actuator that can generate rotary motion of the sphere-shaped rotor as well as induce planar motion of the flat stage. The actuator has a small size and simple design and can be integrated into a printed circuit board (PCB). The application field of the actuator is small-dimensional and high-precision positioning systems. The piezoelectric actuator comprises three rectangular bimorph plates joined with arcs and arranged by an angle of 120 degrees. A high-stiffness rod is glued on the top surface of each bimorph plate and is used to rotate the rotor or move flat stage employing contact friction force. Three U-shaped structures are used for the actuator clamping. 2-DOF rotational or planar movement is obtained by applying a harmonic or asymmetric electrical signal. The operation principle of the actuator is based on the superposition of the B<sub>20</sub> out-of-plane bending mode of the bimorph plates and the B<sub>03</sub> radial vibration mode of the ring. Design optimization has been performed to maximize amplitudes of contact point vibration. A prototype of the actuator was made, and a maximum rotation speed of 795.15 RPM was achieved while preload of 546.03 mN was applied. The linear velocity of 36.45 mm/s was obtained at the same preload force. Resolution measurement showed that the actuator can achieve an angular resolution of 17.48 µrad and a linear resolution of 2.75 µm. |
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| ISSN: | 2072-666X |