Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV)
Thermal stress induced by annealing the Cu filling of through-silicon vias (TSVs) requires further investigation as it can inhibit the performance of semiconductor devices. This study reports the filling behavior of TSVs prepared using direct current and pulse current Cu electrodeposition with and w...
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2020-10-01
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| Series: | Frontiers in Chemistry |
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| Online Access: | https://www.frontiersin.org/article/10.3389/fchem.2020.00771/full |
| _version_ | 1818556415557500928 |
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| author | Youjung Kim Sanghyun Jin Kimoon Park Jinhyun Lee Jae-Hong Lim Bongyoung Yoo Bongyoung Yoo Bongyoung Yoo |
| author_facet | Youjung Kim Sanghyun Jin Kimoon Park Jinhyun Lee Jae-Hong Lim Bongyoung Yoo Bongyoung Yoo Bongyoung Yoo |
| author_sort | Youjung Kim |
| collection | DOAJ |
| description | Thermal stress induced by annealing the Cu filling of through-silicon vias (TSVs) requires further investigation as it can inhibit the performance of semiconductor devices. This study reports the filling behavior of TSVs prepared using direct current and pulse current Cu electrodeposition with and without pre-annealing. The thermal extrusion of Cu inside the TSVs was studied by observing the extrusion behavior after annealing and the changes in grain orientation using scanning electron microscopy and electron backscatter diffraction. The bottom-up filling ratio achieved by the direct current approach decreased because the current was used both to fill the TSV and to grow bump defects on the top surface of the wafer. In contrast, pulse current electrodeposition yielded an improved TSV bottom-up filling ratio and no bump defects, which is attributable to strong suppression and thin diffusion layer. Moreover, Cu deposited with a pulse current exhibited lesser thermal extrusion, which was attributed to the formation of nanotwins and a change in the grain orientation from random to (101). Based on the results, thermal extrusion of the total area of the TSVs could be obtained by pulse current electrodeposition with pre-annealing. |
| first_indexed | 2024-12-13T23:47:03Z |
| format | Article |
| id | doaj.art-6dad5c9faf4d447eb5d91460369a2b74 |
| institution | Directory Open Access Journal |
| issn | 2296-2646 |
| language | English |
| last_indexed | 2024-12-13T23:47:03Z |
| publishDate | 2020-10-01 |
| publisher | Frontiers Media S.A. |
| record_format | Article |
| series | Frontiers in Chemistry |
| spelling | doaj.art-6dad5c9faf4d447eb5d91460369a2b742022-12-21T23:26:55ZengFrontiers Media S.A.Frontiers in Chemistry2296-26462020-10-01810.3389/fchem.2020.00771565007Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV)Youjung Kim0Sanghyun Jin1Kimoon Park2Jinhyun Lee3Jae-Hong Lim4Bongyoung Yoo5Bongyoung Yoo6Bongyoung Yoo7Department of Materials Science and Chemical Engineering, Hanyang University, Ansan, South KoreaDepartment of Material Engineering, Hanyang University, Ansan, South KoreaDepartment of Advanced Material Science Engineering, Hanyang University, Ansan, South KoreaDepartment of Materials Science and Chemical Engineering, Hanyang University, Ansan, South KoreaDepartment of Materials Science and Engineering, Gachon University, Seongnam-Si, South KoreaDepartment of Materials Science and Chemical Engineering, Hanyang University, Ansan, South KoreaDepartment of Material Engineering, Hanyang University, Ansan, South KoreaDepartment of Advanced Material Science Engineering, Hanyang University, Ansan, South KoreaThermal stress induced by annealing the Cu filling of through-silicon vias (TSVs) requires further investigation as it can inhibit the performance of semiconductor devices. This study reports the filling behavior of TSVs prepared using direct current and pulse current Cu electrodeposition with and without pre-annealing. The thermal extrusion of Cu inside the TSVs was studied by observing the extrusion behavior after annealing and the changes in grain orientation using scanning electron microscopy and electron backscatter diffraction. The bottom-up filling ratio achieved by the direct current approach decreased because the current was used both to fill the TSV and to grow bump defects on the top surface of the wafer. In contrast, pulse current electrodeposition yielded an improved TSV bottom-up filling ratio and no bump defects, which is attributable to strong suppression and thin diffusion layer. Moreover, Cu deposited with a pulse current exhibited lesser thermal extrusion, which was attributed to the formation of nanotwins and a change in the grain orientation from random to (101). Based on the results, thermal extrusion of the total area of the TSVs could be obtained by pulse current electrodeposition with pre-annealing.https://www.frontiersin.org/article/10.3389/fchem.2020.00771/fullthrough-silicon-via (TSV)pulse currentpre-annealingthermal extrusionseed layer |
| spellingShingle | Youjung Kim Sanghyun Jin Kimoon Park Jinhyun Lee Jae-Hong Lim Bongyoung Yoo Bongyoung Yoo Bongyoung Yoo Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV) Frontiers in Chemistry through-silicon-via (TSV) pulse current pre-annealing thermal extrusion seed layer |
| title | Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV) |
| title_full | Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV) |
| title_fullStr | Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV) |
| title_full_unstemmed | Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV) |
| title_short | Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV) |
| title_sort | effect of pulse current and pre annealing on thermal extrusion of cu in through silicon via tsv |
| topic | through-silicon-via (TSV) pulse current pre-annealing thermal extrusion seed layer |
| url | https://www.frontiersin.org/article/10.3389/fchem.2020.00771/full |
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