A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors
To improve the solar-blind/visible-blind photocurrent response rejection ratio of solar-blind photodetectors, we designed and fabricated a high-performance SiO<sub>2</sub>/SiN<sub>x</sub> 1-D photonic crystal (PC) ultraviolet (UV) filter on (0 0 0 1) double-polished sapphire...
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| Format: | Article |
| Language: | English |
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IEEE
2019-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8778768/ |
| _version_ | 1819052678042353664 |
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| author | Ruyue Yuan Haifan You Qing Cai Kexiu Dong TaoTao Tao Bin Liu Dunjun Chen Rong Zhang Youdou Zheng |
| author_facet | Ruyue Yuan Haifan You Qing Cai Kexiu Dong TaoTao Tao Bin Liu Dunjun Chen Rong Zhang Youdou Zheng |
| author_sort | Ruyue Yuan |
| collection | DOAJ |
| description | To improve the solar-blind/visible-blind photocurrent response rejection ratio of solar-blind photodetectors, we designed and fabricated a high-performance SiO<sub>2</sub>/SiN<sub>x</sub> 1-D photonic crystal (PC) ultraviolet (UV) filter on (0 0 0 1) double-polished sapphire substrate. When depositing SiN<sub>x</sub>, we found that employing NH3 as nitrogen precursor instead of N2 can simultaneously improve the peak reflectivity of filter stopband in the designed visible-blind region and the transmissivity in the solar-blind region. Research shows that it is associated with the H atom concentration in SiNx and the generation of Si-O-N transition layer at SiO<sub>2</sub>/SiN<sub>x</sub> interface. Finally, we obtained a high-performance SiO<sub>2</sub>/SiN<sub>x</sub> PC UV filter with a stopband reflectivity over 90% from 285 to 345 nm and a transmissivity over 80% in the solar-blind region. The UV filter is also demonstrated to have a good effect in improving the solar-blind/visible-blind photocurrent response rejection ratio of a back-illuminated AlGaN photodetector by depositing it to the back of the detector. |
| first_indexed | 2024-12-21T12:23:39Z |
| format | Article |
| id | doaj.art-6deef1b3a237444d9521029e1877efa9 |
| institution | Directory Open Access Journal |
| issn | 1943-0655 |
| language | English |
| last_indexed | 2024-12-21T12:23:39Z |
| publishDate | 2019-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj.art-6deef1b3a237444d9521029e1877efa92022-12-21T19:04:15ZengIEEEIEEE Photonics Journal1943-06552019-01-011141710.1109/JPHOT.2019.29313748778768A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind PhotodetectorsRuyue Yuan0https://orcid.org/0000-0003-3630-3540Haifan You1https://orcid.org/0000-0003-0099-6074Qing Cai2https://orcid.org/0000-0002-4625-4714Kexiu Dong3https://orcid.org/0000-0003-4448-4222TaoTao Tao4Bin Liu5https://orcid.org/0000-0002-2393-9147Dunjun Chen6Rong Zhang7Youdou Zheng8Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaKey Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaKey Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaSchool of Mechanical and Electronic Engineering, Chuzhou University, Chuzhou, ChinaKey Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaKey Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaKey Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaKey Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaKey Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing, ChinaTo improve the solar-blind/visible-blind photocurrent response rejection ratio of solar-blind photodetectors, we designed and fabricated a high-performance SiO<sub>2</sub>/SiN<sub>x</sub> 1-D photonic crystal (PC) ultraviolet (UV) filter on (0 0 0 1) double-polished sapphire substrate. When depositing SiN<sub>x</sub>, we found that employing NH3 as nitrogen precursor instead of N2 can simultaneously improve the peak reflectivity of filter stopband in the designed visible-blind region and the transmissivity in the solar-blind region. Research shows that it is associated with the H atom concentration in SiNx and the generation of Si-O-N transition layer at SiO<sub>2</sub>/SiN<sub>x</sub> interface. Finally, we obtained a high-performance SiO<sub>2</sub>/SiN<sub>x</sub> PC UV filter with a stopband reflectivity over 90% from 285 to 345 nm and a transmissivity over 80% in the solar-blind region. The UV filter is also demonstrated to have a good effect in improving the solar-blind/visible-blind photocurrent response rejection ratio of a back-illuminated AlGaN photodetector by depositing it to the back of the detector.https://ieeexplore.ieee.org/document/8778768/Photonic crystal (PC)UV FilterSiO<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX">$_{2}$</tex-math> </inline-formula>/SiN<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX">$_{x}$</tex-math> </inline-formula>photodetectors |
| spellingShingle | Ruyue Yuan Haifan You Qing Cai Kexiu Dong TaoTao Tao Bin Liu Dunjun Chen Rong Zhang Youdou Zheng A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors IEEE Photonics Journal Photonic crystal (PC) UV Filter SiO<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX">$_{2}$</tex-math> </inline-formula>/SiN<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX">$_{x}$</tex-math> </inline-formula> photodetectors |
| title | A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors |
| title_full | A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors |
| title_fullStr | A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors |
| title_full_unstemmed | A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors |
| title_short | A High-Performance SiO<sub>2</sub>/SiN<italic><sub>x</sub></italic> 1-D Photonic Crystal UV Filter Used for Solar-Blind Photodetectors |
| title_sort | high performance sio sub 2 sub x002f sin italic sub x sub italic 1 d photonic crystal uv filter used for solar blind photodetectors |
| topic | Photonic crystal (PC) UV Filter SiO<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX">$_{2}$</tex-math> </inline-formula>/SiN<inline-formula xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"> <tex-math notation="LaTeX">$_{x}$</tex-math> </inline-formula> photodetectors |
| url | https://ieeexplore.ieee.org/document/8778768/ |
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