A critique of the approach to controlling electrostatic risk in semiconductor production and identification of a potential risk from the use of equipotential bonding

A critique of the approach to controlling electrostatic risk in semiconductor production and identification of a potential risk from the use of equipotential bonding

Equipotential bonding, whereby objects are connected to a common electrical potential (usually ground) to prevent electrostatic discharges during material handling, has been shown to increase the risk of field-induced reticle damage. It is explained how the presence of an electric field can cause el...

Disgrifiad llawn

Manylion Llyfryddiaeth
Prif Awdur:	Gavin C Rider
Fformat:	Erthygl
Iaith:	English
Cyhoeddwyd:	AIMS Press 2019-01-01
Cyfres:	AIMS Electronics and Electrical Engineering
Pynciau:	esd efm esds ees field induction device damage equipotential bonding grounding
Mynediad Ar-lein:	https://www.aimspress.com/article/10.3934/ElectrEng.2019.4.397/fulltext.html

Eitemau Tebyg

Endoscopic submucosal dissection
gan: Carlos Robles-Medranda
Cyhoeddwyd: (2012-05-01)

Equipotential Space in Housing as a Strategy for Adaptability
gan: José Luis Bezos Alonso
Cyhoeddwyd: (2021-04-01)

Correlational Study: Teacher Perceptions and The Implementation of Education for Sustainable Development Competency for Junior High School Teachers
gan: Dadi Mulyadi, et al.
Cyhoeddwyd: (2023-06-01)

Mapping of equipotential surfaces using the free Quantum Geographic Information System software
gan: H. Finatto, et al.

Mathematical method for air electrostatic discharge circuits calculation
gan: Liu Xinggang, et al.
Cyhoeddwyd: (2018-09-01)

Circumferential Endoscopic Submucosal Dissection for Barrett's Esophagus with Multifocal High-Grade Dysplasia
gan: Pankaj Gupta, et al.
Cyhoeddwyd: (2024-12-01)

Valuation of the impact of celestial bodies on the equipotential surface of the Earth’s gravity field
gan: Petras Petroškevičius, et al.
Cyhoeddwyd: (2012-08-01)

Experimental study of hybrid-knife endoscopic submucosal dissection (ESD) versus standard ESD in a Western country
gan: Joaquín de-la Peña, et al.
Cyhoeddwyd: (2014-02-01)

Studies generalization of shape change of equipotential surfaces of stress-deformed objects
gan: B.А., et al.
Cyhoeddwyd: (2023-06-01)

Electrostatic tip-dielectric sample interaction in electrostatic force microscopy
gan: Ariel Gómez, et al.
Cyhoeddwyd: (2013-03-01)

Investigation of an Electrostatic Discharge Protective Biodegradable Packaging Foam in the Logistic Chain
gan: Mojzes Ákos, et al.
Cyhoeddwyd: (2014-11-01)

Fever and electrocoagulation syndrome after colorectal endoscopic submucosal dissection for patients with immunosuppressants and steroids
gan: Shumpei Yamamoto, et al.
Cyhoeddwyd: (2022-04-01)

Perangkat Pembelajaran Virtual Field Trip Berbasis Education For Sustainable Development Di Sekolah Dasar
gan: Rahmania Zahara, et al.
Cyhoeddwyd: (2022-03-01)

Contesting ‘Environment’ Through the Lens of Sustainability: Examining Implications for Environmental Education (EE) and Education for Sustainable Development (ESD)
gan: Helen Kopnina
Cyhoeddwyd: (2014-10-01)

Silicon-Controlled Rectifier Embedded Diode for 7 nm FinFET Process Electrostatic Discharge Protection
gan: Xinyu Zhu, et al.
Cyhoeddwyd: (2022-05-01)

Pengembangan Aplikasi Mobile Learning untuk Perangkat Pembelajaran Berbasis Education for Sustainable Development
gan: Ajeng Fitria, et al.
Cyhoeddwyd: (2021-07-01)

Endoscopic Submucosal Dissection of Superficial Colorectal Neoplasms at “Challenging Sites” Using a Double-Balloon Endoluminal Interventional Platform: A Single-Center Study
gan: Gianluca Andrisani, et al.
Cyhoeddwyd: (2023-10-01)

Analisis Potensi RPP Education for Sustainable Development pada Mata Pelajaran Fisika SMA
gan: Tirtandro Meda
Cyhoeddwyd: (2022-08-01)

Microstructural Analysis of Three Layer Depositions with Ni and Ti on Steel Using the EDS Method
gan: Manuela-Cristina PERJU, et al.
Cyhoeddwyd: (2019-06-01)

EPL-PRM: Equipotential line sampling strategy for probabilistic roadmap planners in narrow passages
gan: Run Yang, et al.
Cyhoeddwyd: (2023-09-01)

Through-the-scope clip retention rates and performance in a porcine model
gan: Jad AbiMansour, et al.
Cyhoeddwyd: (2024-01-01)

Underwater Duodenal ESD of a Large Adenoma Using the Pocket-Creation Method
gan: João Santos-Antunes, et al.
Cyhoeddwyd: (2020-12-01)

Study on ESD Protection Circuit by TCAD Simulation and TLP Experiment
gan: Fuxing Li, et al.
Cyhoeddwyd: (2023-03-01)

Design of LDO Regulator With High Reliability ESD Protection Circuit Using Analog Current Switch Structure for 5-V Applications
gan: Sang-Wook Kwon, et al.
Cyhoeddwyd: (2023-01-01)

Towards Higher Education for Sustainable Development in BRICS: Focus on Brazil and South Africa
gan: Carlo Daniels, et al.
Cyhoeddwyd: (2023-06-01)

PENGEMBANGAN SENTRA BUDIDAYA MELON DI PANTAI BOCOR KABUPATEN KEBUMEN MELALUI IMPLEMENTASI EDUCATION FOR SUSTAINABLE DEVELOPMENT
gan: Budi Setiadi Daryono, et al.
Cyhoeddwyd: (2016-03-01)

Education for Sustainable Develoment (ESD) – Pancasila di Desa Towangsan: Paradigma Pembangunan yang Berkelanjutan
gan: Sindung Tjahyadi, et al.
Cyhoeddwyd: (2019-03-01)

A Screen Method for the Mass-Production of the Small-Size and Side-View LED Package
gan: Wen-Ray Chen, et al.
Cyhoeddwyd: (2018-08-01)

Determination of Safety Integrity Level (SIL) using LOPA method in the Emergency Shutdown system (ESD) of Hydrogen unit.
gan: Iraj Alimohamdadi, et al.
Cyhoeddwyd: (2014-10-01)

Endoscopic submucosal dissection for gastric ectopic pancreas: a single-center experience
gan: Yangyang Zhou, et al.
Cyhoeddwyd: (2019-04-01)

Pad-Based CDM ESD Protection Methods Are Faulty
gan: Mengfu Di, et al.
Cyhoeddwyd: (2020-01-01)

Quantitative TLP Waveform Analysis for GGNmosts
gan: Gijs J. De Raad
Cyhoeddwyd: (2018-01-01)

Outcomes and validity of risk stratification tools for endoscopic submucosal dissection of early gastric cancer in Western Australia
gan: Ciaran Judge, et al.
Cyhoeddwyd: (2024-11-01)

Electrostatic discharge protection of MiniLED backlight units on glass
gan: Juncheng Xiao, et al.
Cyhoeddwyd: (2021-11-01)

A New Modified Helmholtz Equation for the Expression of the Gravity Gradient and the Intensity of an Electrostatic Field in Spherical Harmonics
gan: Gerassimos Manoussakis
Cyhoeddwyd: (2023-10-01)

Design of High-Robustness LDO Regulator With Floating SCR Based ESD Protection Circuit Using High Gain Buffer
gan: Sang-Wook Kwon, et al.
Cyhoeddwyd: (2024-01-01)

Eco-Schools Indian Ocean: Relating Contemporary ESD Theory to Real Change on the Ground
gan: Copsey Olivia
Cyhoeddwyd: (2018-06-01)

Non-equipotential effect observed on the surface of Ti/Si under uniform illumination
gan: Chunlian Mei, et al.
Cyhoeddwyd: (2020-01-01)

Effectiveness and risk factors of endoscopic submucosal dissection for right colon neoplasms
gan: E. A. Khomyakov, et al.
Cyhoeddwyd: (2020-11-01)

Related Factors and Risk Model Prediction of Pneumonia After ESD in Patients with Early Gastric Cancer
gan: LIU Xiaoyan, et al.
Cyhoeddwyd: (2019-10-01)