Effect of Process Parameters on Mode Conversion in Submicron Tapered Silicon Ridge Waveguides
The modal property and light propagation in tapered silicon ridge waveguides with different ridge heights are investigated for a silicon on insulator (SOI) platform with a 500 nm silicon (Si) thickness. Mode conversion between the transverse magnetic (TM) fundamental and higher-order transverse elec...
| Auteurs principaux: | , , |
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| Format: | Article |
| Langue: | English |
| Publié: |
MDPI AG
2021-03-01
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| Collection: | Applied Sciences |
| Sujets: | |
| Accès en ligne: | https://www.mdpi.com/2076-3417/11/5/2366 |