Effect of Process Parameters on Mode Conversion in Submicron Tapered Silicon Ridge Waveguides
The modal property and light propagation in tapered silicon ridge waveguides with different ridge heights are investigated for a silicon on insulator (SOI) platform with a 500 nm silicon (Si) thickness. Mode conversion between the transverse magnetic (TM) fundamental and higher-order transverse elec...
| Главные авторы: | , , |
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| Формат: | Статья |
| Язык: | English |
| Опубликовано: |
MDPI AG
2021-03-01
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| Серии: | Applied Sciences |
| Предметы: | |
| Online-ссылка: | https://www.mdpi.com/2076-3417/11/5/2366 |