Ion sputtering as methods for generation of cluster particles
The investigations of emission and fragmentation of silicon oxide clusters sputtered from Si surface have been performed. It has been shown that the processes of formation of these clusters can be qualitatively described within the framework of modern concepts, and the main channels of their formati...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2023/98/e3sconf_rses23_01065.pdf |