Investigation of the Atomic Layer Deposition of the Titanium Dioxide (TiO<sub>2</sub>) Film as pH Sensor Using a Switched Capacitor Amplifier

Investigation of the Atomic Layer Deposition of the Titanium Dioxide (TiO<sub>2</sub>) Film as pH Sensor Using a Switched Capacitor Amplifier

The electrical and chemical properties of the titanium dioxide (TiO<sub>2</sub>) coated spirals grown by the atomic layer deposition (ALD) technique in two different temperatures of 150 °C and 300 °C are studied. The thickness of the TiO<sub>2</sub> layers studied are 20, 40,...

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Bibliographic Details
Main Authors:	Mozhdeh Nematzadeh, Ola Nilsen, Philipp Dominik Häfliger, Veronica Anne-Line Kathrine Killi
Format:	Article
Language:	English
Published:	MDPI AG 2022-07-01
Series:	Chemosensors
Subjects:	atomic layer deposition counter electrode charge transfer resistance pH sensor reference electrode surface roughness
Online Access:	https://www.mdpi.com/2227-9040/10/7/274

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