A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology
In this paper, we proposed an ultrafast and nanoscale hot-wire flow (NHF) sensor implemented in a 0.18 µm complementary metal-oxide-semiconductor microelectromechanical system (CMOS-MEMS) technology. The nanoscale wire was released and reduced in thickness and width by an in-house developed post-CMO...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2022-04-01
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| Series: | Frontiers in Mechanical Engineering |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fmech.2022.877754/full |
| _version_ | 1828366713034375168 |
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| author | Xiaoyi Wang Xiaoyi Wang Zetao Fang Xiangyu Song Wei Xu |
| author_facet | Xiaoyi Wang Xiaoyi Wang Zetao Fang Xiangyu Song Wei Xu |
| author_sort | Xiaoyi Wang |
| collection | DOAJ |
| description | In this paper, we proposed an ultrafast and nanoscale hot-wire flow (NHF) sensor implemented in a 0.18 µm complementary metal-oxide-semiconductor microelectromechanical system (CMOS-MEMS) technology. The nanoscale wire was released and reduced in thickness and width by an in-house developed post-CMOS fabrication process, hence the heat conduction loss is greatly suppressed, while the response time of the NHF sensor is significantly improved. Benefiting from the nano size of the hot-wire (a width of 622 nm), the NHF sensor exhibits an ultrafast response time of 30 µs (@ airflow velocity of 0 m/s), a wide flow range of 0–30 m/s, and a cut-off frequency of 21 kHz under the constant temperature (CT) mode. In addition, an equivalent circuit model (ECM) was established in PSPICE to predict the NHF sensor performance, and the theoretical simulation results were in good agreement with the experiment results. |
| first_indexed | 2024-04-14T05:48:37Z |
| format | Article |
| id | doaj.art-6ed29f4bd8a447a3a121e658a17ffc7a |
| institution | Directory Open Access Journal |
| issn | 2297-3079 |
| language | English |
| last_indexed | 2024-04-14T05:48:37Z |
| publishDate | 2022-04-01 |
| publisher | Frontiers Media S.A. |
| record_format | Article |
| series | Frontiers in Mechanical Engineering |
| spelling | doaj.art-6ed29f4bd8a447a3a121e658a17ffc7a2022-12-22T02:09:11ZengFrontiers Media S.A.Frontiers in Mechanical Engineering2297-30792022-04-01810.3389/fmech.2022.877754877754A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS TechnologyXiaoyi Wang0Xiaoyi Wang1Zetao Fang2Xiangyu Song3Wei Xu4College of Electronics and Information Engineering, Shenzhen University, Shenzhen, ChinaSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing, ChinaCollege of Electronics and Information Engineering, Shenzhen University, Shenzhen, ChinaCollege of Electronics and Information Engineering, Shenzhen University, Shenzhen, ChinaCollege of Electronics and Information Engineering, Shenzhen University, Shenzhen, ChinaIn this paper, we proposed an ultrafast and nanoscale hot-wire flow (NHF) sensor implemented in a 0.18 µm complementary metal-oxide-semiconductor microelectromechanical system (CMOS-MEMS) technology. The nanoscale wire was released and reduced in thickness and width by an in-house developed post-CMOS fabrication process, hence the heat conduction loss is greatly suppressed, while the response time of the NHF sensor is significantly improved. Benefiting from the nano size of the hot-wire (a width of 622 nm), the NHF sensor exhibits an ultrafast response time of 30 µs (@ airflow velocity of 0 m/s), a wide flow range of 0–30 m/s, and a cut-off frequency of 21 kHz under the constant temperature (CT) mode. In addition, an equivalent circuit model (ECM) was established in PSPICE to predict the NHF sensor performance, and the theoretical simulation results were in good agreement with the experiment results.https://www.frontiersin.org/articles/10.3389/fmech.2022.877754/fullCOMS-MEMSnanoscalehot-wireresponse timecut-off frequency |
| spellingShingle | Xiaoyi Wang Xiaoyi Wang Zetao Fang Xiangyu Song Wei Xu A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology Frontiers in Mechanical Engineering COMS-MEMS nanoscale hot-wire response time cut-off frequency |
| title | A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology |
| title_full | A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology |
| title_fullStr | A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology |
| title_full_unstemmed | A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology |
| title_short | A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology |
| title_sort | nanoscale hot wire flow sensor based on cmos mems technology |
| topic | COMS-MEMS nanoscale hot-wire response time cut-off frequency |
| url | https://www.frontiersin.org/articles/10.3389/fmech.2022.877754/full |
| work_keys_str_mv | AT xiaoyiwang ananoscalehotwireflowsensorbasedoncmosmemstechnology AT xiaoyiwang ananoscalehotwireflowsensorbasedoncmosmemstechnology AT zetaofang ananoscalehotwireflowsensorbasedoncmosmemstechnology AT xiangyusong ananoscalehotwireflowsensorbasedoncmosmemstechnology AT weixu ananoscalehotwireflowsensorbasedoncmosmemstechnology AT xiaoyiwang nanoscalehotwireflowsensorbasedoncmosmemstechnology AT xiaoyiwang nanoscalehotwireflowsensorbasedoncmosmemstechnology AT zetaofang nanoscalehotwireflowsensorbasedoncmosmemstechnology AT xiangyusong nanoscalehotwireflowsensorbasedoncmosmemstechnology AT weixu nanoscalehotwireflowsensorbasedoncmosmemstechnology |