A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology
In this paper, we proposed an ultrafast and nanoscale hot-wire flow (NHF) sensor implemented in a 0.18 µm complementary metal-oxide-semiconductor microelectromechanical system (CMOS-MEMS) technology. The nanoscale wire was released and reduced in thickness and width by an in-house developed post-CMO...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-04-01
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| Series: | Frontiers in Mechanical Engineering |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fmech.2022.877754/full |