Wide-Band Optical Fibre System for Investigation of MEMS and NEMS Deflection

In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-b...

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Bibliographic Details
Main Authors: Orłowska Karolina, Świątkowski Michał, Kunicki Piotr, Słupski Piotr, Sankowska Anna, Gotszalk Teodor
Format: Article
Language:English
Published: Polish Academy of Sciences 2014-08-01
Series:Metrology and Measurement Systems
Subjects:
Online Access:http://www.degruyter.com/view/j/mms.2014.21.issue-3/mms-2014-0032/mms-2014-0032.xml?format=INT