Wide-Band Optical Fibre System for Investigation of MEMS and NEMS Deflection
In this work the construction of experimental setup for MEMS/NEMS deflection measurements is presented. The system is based on intensity fibre optic detector for linear displacement sensing. Furthermore the electronic devices: current source for driving the light source and photodetector with wide-b...
Main Authors: | , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Polish Academy of Sciences
2014-08-01
|
Series: | Metrology and Measurement Systems |
Subjects: | |
Online Access: | http://www.degruyter.com/view/j/mms.2014.21.issue-3/mms-2014-0032/mms-2014-0032.xml?format=INT |