A novel stable nanopositioner based on a single piezoelectric stack: PistolDrive
We describe a novel stable piezoelectric nanopositioner which just use one piezoelectric stack and one simple driving signal, in which the central shaft is clamped by one BeCu spring and four SiN balls that bonded to the inner wall of the cylindrical tube. The cylindrical tube is fixed on the free e...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5054922 |