A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT
This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2015-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/15/2/2538 |
| _version_ | 1797999548192260096 |
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| author | Zhe Wang Qing-Tang Xue Yuan-Quan Chen Yi Shu He Tian Yi Yang Dan Xie Jian-Wen Luo Tian-Ling Ren |
| author_facet | Zhe Wang Qing-Tang Xue Yuan-Quan Chen Yi Shu He Tian Yi Yang Dan Xie Jian-Wen Luo Tian-Ling Ren |
| author_sort | Zhe Wang |
| collection | DOAJ |
| description | This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications. |
| first_indexed | 2024-04-11T11:05:11Z |
| format | Article |
| id | doaj.art-6fa9e2b31e6c4ec1a6a3e038514b945f |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T11:05:11Z |
| publishDate | 2015-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-6fa9e2b31e6c4ec1a6a3e038514b945f2022-12-22T04:28:21ZengMDPI AGSensors1424-82202015-01-011522538254710.3390/s150202538s150202538A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZTZhe Wang0Qing-Tang Xue1Yuan-Quan Chen2Yi Shu3He Tian4Yi Yang5Dan Xie6Jian-Wen Luo7Tian-Ling Ren8Institute of Microelectronics, Tsinghua University, Beijing 100084, ChinaInstitute of Microelectronics, Tsinghua University, Beijing 100084, ChinaInstitute of Microelectronics, Tsinghua University, Beijing 100084, ChinaInstitute of Microelectronics, Tsinghua University, Beijing 100084, ChinaInstitute of Microelectronics, Tsinghua University, Beijing 100084, ChinaInstitute of Microelectronics, Tsinghua University, Beijing 100084, ChinaInstitute of Microelectronics, Tsinghua University, Beijing 100084, ChinaDepartment of Biomedical Engineering, Tsinghua University, Beijing 100084, ChinaInstitute of Microelectronics, Tsinghua University, Beijing 100084, ChinaThis paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.http://www.mdpi.com/1424-8220/15/2/2538ultrasonicflexible ultrasound transducerultrasound imagingflexible devicePZT |
| spellingShingle | Zhe Wang Qing-Tang Xue Yuan-Quan Chen Yi Shu He Tian Yi Yang Dan Xie Jian-Wen Luo Tian-Ling Ren A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT Sensors ultrasonic flexible ultrasound transducer ultrasound imaging flexible device PZT |
| title | A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT |
| title_full | A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT |
| title_fullStr | A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT |
| title_full_unstemmed | A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT |
| title_short | A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT |
| title_sort | flexible ultrasound transducer array with micro machined bulk pzt |
| topic | ultrasonic flexible ultrasound transducer ultrasound imaging flexible device PZT |
| url | http://www.mdpi.com/1424-8220/15/2/2538 |
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