Fabrication and Characterization of a Multichannel 3D Thermopile for Chip Calorimeter Applications

Thermal sensors based on thermopiles are some of the most robust and popular temperature sensing technologies across industries and research disciplines. A chip calorimeter with a 3D thermopile layout with a large sensing area and multichannel capacity has been developed, which is highly desired for...

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Bibliographic Details
Main Authors: Tho Phuoc Huynh, Yilei Zhang, Cohen Yehuda
Format: Article
Language:English
Published: MDPI AG 2015-02-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/15/2/3351