MEMS-Based Integrated Triaxial Electrochemical Seismometer

MEMS-Based Integrated Triaxial Electrochemical Seismometer

This paper presents a micro-electromechanical systems (MEMS)-based integrated triaxial electrochemical seismometer, which can detect three-dimensional vibration. By integrating three axes, the integrated triaxial electrochemical seismometer is characterized by small volume and high symmetry. The num...

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Bibliographic Details
Main Authors: Wenjie Qi, Bowen Liu, Tian Liang, Jian Chen, Deyong Chen, Junbo Wang
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Micromachines
Subjects:
electrochemical seismometer
integrated triaxial
micro-electro-mechanical system
Online Access:https://www.mdpi.com/2072-666X/12/10/1156

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