| Summary: | During the electrochemical reaction of a high temperature proton exchange membrane fuel cell (HT-PEMFC), (in this paper HT-PEMFC means operating in the range of 120 to 200 °C) the inhomogeneity of temperature, flow rate, and pressure in the interior is likely to cause the reduction of ion conductivity or thermal stability weight loss of proton exchange membrane materials, and it is additionally likely to cause uneven fuel distribution, thereby affecting the working performance and service life of the HT-PEMFC. This study used micro-electro-mechanical systems (MEMS) technology to develop a flexible three-in-one microsensor which is resistant to high temperature electrochemical environments; we selected appropriate materials and process parameters to protect the microsensor from failure or damage under long-term tests. The proposed method can monitor the local temperature, flow rate, and pressure distribution in HT-PEMFC in real time.
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