A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

A Three-Axis Magnetic Field Microsensor Fabricated Utilizing a CMOS Process

This study develops a three-axis magnetic field (MF) microsensor manufactured by a complementary metal oxide semiconductor (CMOS) process. The MF microsensor contains a ring emitter, four bases, and eight collectors. Sentaurus TCAD was used to simulate the microsensor characterization. The STI (shal...

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Bibliographic Details
Main Authors: Jian-Zhi Tseng, Po-Jen Shih, Cheng-Chih Hsu, Ching-Liang Dai
Format: Article
Language:English
Published: MDPI AG 2017-12-01
Series:Applied Sciences
Subjects:
magnetic field sensor
magnetotransistor
CMOS process
MEMS
Online Access:https://www.mdpi.com/2076-3417/7/12/1289

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