Design and Analysis of a Fluid-Filled RF MEMS Switch

Design and Analysis of a Fluid-Filled RF MEMS Switch

In the present study, a fluid-filled RF MEMS (Radio Frequency Micro-Electro-Mechanical Systems) switch is proposed and designed. In the analysis of the operating principle of the proposed switch, air, water, glycerol and silicone oil were adopted as filling dielectric to simulate and research the in...

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Bibliographic Details
Main Authors: Hongyu Zhu, Wenhao Cui, Yanzhang Li, Mingxin Song
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Sensors
Subjects:
radio frequency (RF)
MEMS
insertion loss
driving voltage
impact velocity
Online Access:https://www.mdpi.com/1424-8220/23/5/2692

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