On the Effect of the Co-Introduction of Al and Ga Impurities on the Electrical Performance of Transparent Conductive ZnO-Based Thin Films

On the Effect of the Co-Introduction of Al and Ga Impurities on the Electrical Performance of Transparent Conductive ZnO-Based Thin Films

In this study, a set of ZnO-based thin films were prepared on glass substrates at various substrate temperatures via the direct current magnetron sputtering of ceramic targets with the following compositions: pure ZnO, Al-doped ZnO with doping levels of 1 and 2 at.%, Ga-doped ZnO with doping levels...

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Bibliographic Details
Main Authors: Abil S. Asvarov, Aslan K. Abduev, Akhmed K. Akhmedov, Vladimir M. Kanevsky
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Materials
Subjects:
ZnO
TCO
thin film
magnetron sputtering
ceramic target
doping
Online Access:https://www.mdpi.com/1996-1944/15/17/5862

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