High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector

A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance. With the aluminum nitride as the piezoelectric layer, t...

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Bibliographic Details
Main Authors: Yuxuan Hu, Bo Dong, Liang Lei, Zhizhong Wang, Shuangchen Ruan
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/22/19/7439

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