High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector
A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance. With the aluminum nitride as the piezoelectric layer, t...
Main Authors: | Yuxuan Hu, Bo Dong, Liang Lei, Zhizhong Wang, Shuangchen Ruan |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-09-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/22/19/7439 |
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