Sapphire-Based Dammann Gratings for UV Beam Splitting
We report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, together wit...
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| Format: | Article |
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IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/7605520/ |
| _version_ | 1830092124677210112 |
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| author | Qian-Kun Li Qi-Dai Chen Li-Gang Niu Yan-Hao Yu Lei Wang Yun-Lu Sun Hong-Bo Sun |
| author_facet | Qian-Kun Li Qi-Dai Chen Li-Gang Niu Yan-Hao Yu Lei Wang Yun-Lu Sun Hong-Bo Sun |
| author_sort | Qian-Kun Li |
| collection | DOAJ |
| description | We report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, together with well-tailored geometry, was obtained. These DGs generated 2 × 2, 3 × 3, 4 × 4, and 5 × 5 spot sources in the fan-out as designed and exhibited diffraction efficiency of 59.26%, 39.53%, 44.68%, and 55.37%, respectively, comparable with theoretical values. Such sapphire-based DGs show great potential in UV beam shaping, UV beam splitting, and laser parallel microprocessing. |
| first_indexed | 2024-12-16T17:33:17Z |
| format | Article |
| id | doaj.art-70f0b19c629b40c2b4b6d06ecf4ad937 |
| institution | Directory Open Access Journal |
| issn | 1943-0655 |
| language | English |
| last_indexed | 2024-12-16T17:33:17Z |
| publishDate | 2016-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj.art-70f0b19c629b40c2b4b6d06ecf4ad9372022-12-21T22:22:52ZengIEEEIEEE Photonics Journal1943-06552016-01-01861810.1109/JPHOT.2016.26203437605520Sapphire-Based Dammann Gratings for UV Beam SplittingQian-Kun Li0Qi-Dai Chen1Li-Gang Niu2Yan-Hao Yu3Lei Wang4Yun-Lu Sun5Hong-Bo Sun6State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, ChinaState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, ChinaState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, ChinaState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, ChinaState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, ChinaState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, ChinaState Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, ChinaWe report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, together with well-tailored geometry, was obtained. These DGs generated 2 × 2, 3 × 3, 4 × 4, and 5 × 5 spot sources in the fan-out as designed and exhibited diffraction efficiency of 59.26%, 39.53%, 44.68%, and 55.37%, respectively, comparable with theoretical values. Such sapphire-based DGs show great potential in UV beam shaping, UV beam splitting, and laser parallel microprocessing.https://ieeexplore.ieee.org/document/7605520/Fabrication and characterizationultraviolet (UV) lasersmicro-opticslaser amplifiers. |
| spellingShingle | Qian-Kun Li Qi-Dai Chen Li-Gang Niu Yan-Hao Yu Lei Wang Yun-Lu Sun Hong-Bo Sun Sapphire-Based Dammann Gratings for UV Beam Splitting IEEE Photonics Journal Fabrication and characterization ultraviolet (UV) lasers micro-optics laser amplifiers. |
| title | Sapphire-Based Dammann Gratings for UV Beam Splitting |
| title_full | Sapphire-Based Dammann Gratings for UV Beam Splitting |
| title_fullStr | Sapphire-Based Dammann Gratings for UV Beam Splitting |
| title_full_unstemmed | Sapphire-Based Dammann Gratings for UV Beam Splitting |
| title_short | Sapphire-Based Dammann Gratings for UV Beam Splitting |
| title_sort | sapphire based dammann gratings for uv beam splitting |
| topic | Fabrication and characterization ultraviolet (UV) lasers micro-optics laser amplifiers. |
| url | https://ieeexplore.ieee.org/document/7605520/ |
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