APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN
Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-04-01
|
| Series: | Pribory i Metody Izmerenij |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/139 |
| _version_ | 1797874888542781440 |
|---|---|
| author | Ya. A. Belahurau Ya. I. Shukevich V. V. Barkalin V. V. Khatko I. A. Taratyn |
| author_facet | Ya. A. Belahurau Ya. I. Shukevich V. V. Barkalin V. V. Khatko I. A. Taratyn |
| author_sort | Ya. A. Belahurau |
| collection | DOAJ |
| description | Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations. |
| first_indexed | 2024-04-10T01:38:10Z |
| format | Article |
| id | doaj.art-714f1272c22a4d438a3c7508b430ba46 |
| institution | Directory Open Access Journal |
| issn | 2220-9506 2414-0473 |
| language | English |
| last_indexed | 2024-04-10T01:38:10Z |
| publishDate | 2015-04-01 |
| publisher | Belarusian National Technical University |
| record_format | Article |
| series | Pribory i Metody Izmerenij |
| spelling | doaj.art-714f1272c22a4d438a3c7508b430ba462023-03-13T09:14:45ZengBelarusian National Technical UniversityPribory i Metody Izmerenij2220-95062414-04732015-04-01025965133APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGNYa. A. Belahurau0Ya. I. Shukevich1V. V. Barkalin2V. V. Khatko3I. A. Taratyn4Белорусский национальный технический университетБелорусский национальный технический университетБелорусский национальный технический университетБелорусский национальный технический университетБелорусский национальный технический университетInfluence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the calculations.https://pimi.bntu.by/jour/article/view/139нанопористый анодный оксид алюминия, газовая сенсорная микросистема |
| spellingShingle | Ya. A. Belahurau Ya. I. Shukevich V. V. Barkalin V. V. Khatko I. A. Taratyn APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN Pribory i Metody Izmerenij нанопористый анодный оксид алюминия, газовая сенсорная микросистема |
| title | APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN |
| title_full | APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN |
| title_fullStr | APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN |
| title_full_unstemmed | APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN |
| title_short | APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN |
| title_sort | application of nanoporous anodic alumina by gas microsystem design |
| topic | нанопористый анодный оксид алюминия, газовая сенсорная микросистема |
| url | https://pimi.bntu.by/jour/article/view/139 |
| work_keys_str_mv | AT yaabelahurau applicationofnanoporousanodicaluminabygasmicrosystemdesign AT yaishukevich applicationofnanoporousanodicaluminabygasmicrosystemdesign AT vvbarkalin applicationofnanoporousanodicaluminabygasmicrosystemdesign AT vvkhatko applicationofnanoporousanodicaluminabygasmicrosystemdesign AT iataratyn applicationofnanoporousanodicaluminabygasmicrosystemdesign |