A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components
Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/2/178 |
| _version_ | 1797297475568009216 |
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| author | Wei Li Qiang Xin Bin Fan Qiang Chen Yonghong Deng |
| author_facet | Wei Li Qiang Xin Bin Fan Qiang Chen Yonghong Deng |
| author_sort | Wei Li |
| collection | DOAJ |
| description | Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces. |
| first_indexed | 2024-03-07T22:20:53Z |
| format | Article |
| id | doaj.art-71702d01a6d24f8b9384f4595aafb1e1 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:20:53Z |
| publishDate | 2024-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-71702d01a6d24f8b9384f4595aafb1e12024-02-23T15:27:31ZengMDPI AGMicromachines2072-666X2024-01-0115217810.3390/mi15020178A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical ComponentsWei Li0Qiang Xin1Bin Fan2Qiang Chen3Yonghong Deng4National Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, ChinaNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, ChinaNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, ChinaNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, ChinaNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, ChinaAdvancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces.https://www.mdpi.com/2072-666X/15/2/178ultra-smooth surface processingultra-precision optical componentssurface roughnessmaterial removal mechanism |
| spellingShingle | Wei Li Qiang Xin Bin Fan Qiang Chen Yonghong Deng A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components Micromachines ultra-smooth surface processing ultra-precision optical components surface roughness material removal mechanism |
| title | A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components |
| title_full | A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components |
| title_fullStr | A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components |
| title_full_unstemmed | A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components |
| title_short | A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components |
| title_sort | review of emerging technologies in ultra smooth surface processing for optical components |
| topic | ultra-smooth surface processing ultra-precision optical components surface roughness material removal mechanism |
| url | https://www.mdpi.com/2072-666X/15/2/178 |
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