A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires...

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Bibliographic Details
Main Authors:	Wei Li, Qiang Xin, Bin Fan, Qiang Chen, Yonghong Deng
Format:	Article
Language:	English
Published:	MDPI AG 2024-01-01
Series:	Micromachines
Subjects:	ultra-smooth surface processing ultra-precision optical components surface roughness material removal mechanism
Online Access:	https://www.mdpi.com/2072-666X/15/2/178

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