Design and Simulation of a Low-Actuation-Voltage MEMS Switch
This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a co...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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European Alliance for Innovation (EAI)
2016-12-01
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| Series: | EAI Endorsed Transactions on Energy Web |
| Subjects: | |
| Online Access: | http://eudl.eu/doi/10.4108/eai.28-9-2015.2261432 |
| _version_ | 1818133817991364608 |
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| author | Yasser Mafinejad Abbas Kouzani Ladislau Matekovits |
| author_facet | Yasser Mafinejad Abbas Kouzani Ladislau Matekovits |
| author_sort | Yasser Mafinejad |
| collection | DOAJ |
| description | This paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 µs, respectively, with an actuation voltage of less than 15 V. |
| first_indexed | 2024-12-11T08:58:45Z |
| format | Article |
| id | doaj.art-718f1c1130084ddda5576fe998b378bc |
| institution | Directory Open Access Journal |
| issn | 2032-944X |
| language | English |
| last_indexed | 2024-12-11T08:58:45Z |
| publishDate | 2016-12-01 |
| publisher | European Alliance for Innovation (EAI) |
| record_format | Article |
| series | EAI Endorsed Transactions on Energy Web |
| spelling | doaj.art-718f1c1130084ddda5576fe998b378bc2022-12-22T01:13:49ZengEuropean Alliance for Innovation (EAI)EAI Endorsed Transactions on Energy Web2032-944X2016-12-01391710.4108/eai.28-9-2015.2261432Design and Simulation of a Low-Actuation-Voltage MEMS SwitchYasser Mafinejad0Abbas Kouzani1Ladislau Matekovits2School of Engineering, Deakin University, AustraliaSchool of Engineering, Deakin University, AustraliaPolitecnico di Torino, Italy; ladislau.matekovits@polito.itThis paper presents a low-actuation-voltage micro-electro-mechanical system (MEMS) capacitive shunt switch which has a very large bandwidth (4 GHz to 24 GHz). In this work, the isolation of MEMS switch is improved by adding two short high impedance transmission lines at the beginning and end of a coplanar waveguide (CPW). Simulating the switch demonstrates that a return loss (S11) is less than -26 dB for the entire frequency band, and perfect matching at 20 GHz in upstate position. A ramp dual pulse driver is also designed for reducing the capacitive charge injection for considering the reliability of the switch. The simulation results show that the shifting of voltage due to the capacitive charge is reduced by more than 35% of the initial value. Finally, the dynamic behavior of the MEMS switch is simulated by modal analysis and using CoventorWare to calculate the natural frequencies of the switch and its mode shapes. The switching ON and OFF time are 4.48 and 2.43 µs, respectively, with an actuation voltage of less than 15 V.http://eudl.eu/doi/10.4108/eai.28-9-2015.2261432rf memsswitchlow-actuation-voltagecapacitiveshunt |
| spellingShingle | Yasser Mafinejad Abbas Kouzani Ladislau Matekovits Design and Simulation of a Low-Actuation-Voltage MEMS Switch EAI Endorsed Transactions on Energy Web rf mems switch low-actuation-voltage capacitive shunt |
| title | Design and Simulation of a Low-Actuation-Voltage MEMS Switch |
| title_full | Design and Simulation of a Low-Actuation-Voltage MEMS Switch |
| title_fullStr | Design and Simulation of a Low-Actuation-Voltage MEMS Switch |
| title_full_unstemmed | Design and Simulation of a Low-Actuation-Voltage MEMS Switch |
| title_short | Design and Simulation of a Low-Actuation-Voltage MEMS Switch |
| title_sort | design and simulation of a low actuation voltage mems switch |
| topic | rf mems switch low-actuation-voltage capacitive shunt |
| url | http://eudl.eu/doi/10.4108/eai.28-9-2015.2261432 |
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