Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth
This paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging. The prototype has five independent multielement rings fabric...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-07-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/14/4786 |
| _version_ | 1797526057708945408 |
|---|---|
| author | Eyglis Ledesma Iván Zamora Arantxa Uranga Núria Barniol |
| author_facet | Eyglis Ledesma Iván Zamora Arantxa Uranga Núria Barniol |
| author_sort | Eyglis Ledesma |
| collection | DOAJ |
| description | This paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging. The prototype has five independent multielement rings fabricated by a monolithic process over CMOS, allowing for a very compact and robust design. Crosstalk between rings is under 56 dB, which guarantees an efficient beam focusing on a range between 1.4 mm and 67 µm. The presented PMUT-on-CMOS annular array with an overall diameter down to 669 µm achieves an output pressure in liquid of 4.84 kPa/V/mm<sup>2</sup> at 1.5 mm away from the array when the five channels are excited together, which is the largest reported for PMUTs. Pulse-echo experiments towards high-resolution imaging are demonstrated using the central ring as a receiver. With an equivalent diameter of 149 µm, this central ring provides high receiving sensitivity, 441.6 nV/Pa, higher than that of commercial hydrophones with equivalent size. A 1D ultrasound image using two channels is demonstrated, with maximum received signals of 7 mVpp when a nonintegrated amplifier is used, demonstrating the ultrasound imaging capabilities. |
| first_indexed | 2024-03-10T09:24:45Z |
| format | Article |
| id | doaj.art-7230efae271b4e2ea536f90c035e04cc |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T09:24:45Z |
| publishDate | 2021-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-7230efae271b4e2ea536f90c035e04cc2023-11-22T04:56:06ZengMDPI AGSensors1424-82202021-07-012114478610.3390/s21144786Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus DepthEyglis Ledesma0Iván Zamora1Arantxa Uranga2Núria Barniol3Departament d’Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, SpainDepartament d’Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, SpainDepartament d’Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, SpainDepartament d’Enginyeria Electrònica, Universitat Autónoma de Barcelona, 08193 Bellaterra, SpainThis paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging. The prototype has five independent multielement rings fabricated by a monolithic process over CMOS, allowing for a very compact and robust design. Crosstalk between rings is under 56 dB, which guarantees an efficient beam focusing on a range between 1.4 mm and 67 µm. The presented PMUT-on-CMOS annular array with an overall diameter down to 669 µm achieves an output pressure in liquid of 4.84 kPa/V/mm<sup>2</sup> at 1.5 mm away from the array when the five channels are excited together, which is the largest reported for PMUTs. Pulse-echo experiments towards high-resolution imaging are demonstrated using the central ring as a receiver. With an equivalent diameter of 149 µm, this central ring provides high receiving sensitivity, 441.6 nV/Pa, higher than that of commercial hydrophones with equivalent size. A 1D ultrasound image using two channels is demonstrated, with maximum received signals of 7 mVpp when a nonintegrated amplifier is used, demonstrating the ultrasound imaging capabilities.https://www.mdpi.com/1424-8220/21/14/4786PMUTsannular arrayring arrayultrasoundAlNultrasound imaging |
| spellingShingle | Eyglis Ledesma Iván Zamora Arantxa Uranga Núria Barniol Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth Sensors PMUTs annular array ring array ultrasound AlN ultrasound imaging |
| title | Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth |
| title_full | Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth |
| title_fullStr | Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth |
| title_full_unstemmed | Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth |
| title_short | Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth |
| title_sort | multielement ring array based on minute size pmuts for high acoustic pressure and tunable focus depth |
| topic | PMUTs annular array ring array ultrasound AlN ultrasound imaging |
| url | https://www.mdpi.com/1424-8220/21/14/4786 |
| work_keys_str_mv | AT eyglisledesma multielementringarraybasedonminutesizepmutsforhighacousticpressureandtunablefocusdepth AT ivanzamora multielementringarraybasedonminutesizepmutsforhighacousticpressureandtunablefocusdepth AT arantxauranga multielementringarraybasedonminutesizepmutsforhighacousticpressureandtunablefocusdepth AT nuriabarniol multielementringarraybasedonminutesizepmutsforhighacousticpressureandtunablefocusdepth |