Polyimide-Based Capacitive Humidity Sensor
The development of humidity sensors with simple transduction principles attracts considerable interest by both scientific researchers and industrial companies. Capacitive humidity sensors, based on polyimide sensing material with different thickness and surface morphologies, are prepared. The surfac...
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| Format: | Article |
| Language: | English |
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MDPI AG
2018-05-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/18/5/1516 |
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| author | Jamila Boudaden Matthias Steinmaßl Hanns-Erik Endres Andreas Drost Ignaz Eisele Christoph Kutter Peter Müller-Buschbaum |
| author_facet | Jamila Boudaden Matthias Steinmaßl Hanns-Erik Endres Andreas Drost Ignaz Eisele Christoph Kutter Peter Müller-Buschbaum |
| author_sort | Jamila Boudaden |
| collection | DOAJ |
| description | The development of humidity sensors with simple transduction principles attracts considerable interest by both scientific researchers and industrial companies. Capacitive humidity sensors, based on polyimide sensing material with different thickness and surface morphologies, are prepared. The surface morphology of the sensing layer is varied from flat to rough and then to nanostructure called nanograss by using an oxygen plasma etch process. The relative humidity (RH) sensor selectively responds to the presence of water vapor by a capacitance change. The interaction between polyimide and water molecules is studied by FTIR spectroscopy. The complete characterization of the prepared capacitive humidity sensor performance is realized using a gas mixing setup and an evaluation kit. A linear correlation is found between the measured capacitance and the RH level in the range of 5 to 85%. The morphology of the humidity sensing layer is revealed as an important parameter influencing the sensor performance. It is proved that a nanograss-like structure is the most effective for detecting RH, due to its rapid response and recovery times, which are comparable to or even better than the ones of commercial polymer-based sensors. This work demonstrates the readiness of the developed RH sensor technology for industrialization. |
| first_indexed | 2024-04-13T07:27:50Z |
| format | Article |
| id | doaj.art-726c830491bb408a820462bdc457d245 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T07:27:50Z |
| publishDate | 2018-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-726c830491bb408a820462bdc457d2452022-12-22T02:56:26ZengMDPI AGSensors1424-82202018-05-01185151610.3390/s18051516s18051516Polyimide-Based Capacitive Humidity SensorJamila Boudaden0Matthias Steinmaßl1Hanns-Erik Endres2Andreas Drost3Ignaz Eisele4Christoph Kutter5Peter Müller-Buschbaum6Fraunhofer EMFT, Research Institution for Microsystems and Solid State Technologies EMFT, Hansastraße 27d, D-80686 Munich, GermanyFraunhofer EMFT, Research Institution for Microsystems and Solid State Technologies EMFT, Hansastraße 27d, D-80686 Munich, GermanyFraunhofer EMFT, Research Institution for Microsystems and Solid State Technologies EMFT, Hansastraße 27d, D-80686 Munich, GermanyFraunhofer EMFT, Research Institution for Microsystems and Solid State Technologies EMFT, Hansastraße 27d, D-80686 Munich, GermanyFraunhofer EMFT, Research Institution for Microsystems and Solid State Technologies EMFT, Hansastraße 27d, D-80686 Munich, GermanyFraunhofer EMFT, Research Institution for Microsystems and Solid State Technologies EMFT, Hansastraße 27d, D-80686 Munich, GermanyPhysik-Department, Lehrstuhl für Funktionelle Materialien, Technische Universität München, James-Franck-Strasse 1, D-85748 Garching, GermanyThe development of humidity sensors with simple transduction principles attracts considerable interest by both scientific researchers and industrial companies. Capacitive humidity sensors, based on polyimide sensing material with different thickness and surface morphologies, are prepared. The surface morphology of the sensing layer is varied from flat to rough and then to nanostructure called nanograss by using an oxygen plasma etch process. The relative humidity (RH) sensor selectively responds to the presence of water vapor by a capacitance change. The interaction between polyimide and water molecules is studied by FTIR spectroscopy. The complete characterization of the prepared capacitive humidity sensor performance is realized using a gas mixing setup and an evaluation kit. A linear correlation is found between the measured capacitance and the RH level in the range of 5 to 85%. The morphology of the humidity sensing layer is revealed as an important parameter influencing the sensor performance. It is proved that a nanograss-like structure is the most effective for detecting RH, due to its rapid response and recovery times, which are comparable to or even better than the ones of commercial polymer-based sensors. This work demonstrates the readiness of the developed RH sensor technology for industrialization.http://www.mdpi.com/1424-8220/18/5/1516humidity sensorflat polyimidenanograss polyimiderough polyimide |
| spellingShingle | Jamila Boudaden Matthias Steinmaßl Hanns-Erik Endres Andreas Drost Ignaz Eisele Christoph Kutter Peter Müller-Buschbaum Polyimide-Based Capacitive Humidity Sensor Sensors humidity sensor flat polyimide nanograss polyimide rough polyimide |
| title | Polyimide-Based Capacitive Humidity Sensor |
| title_full | Polyimide-Based Capacitive Humidity Sensor |
| title_fullStr | Polyimide-Based Capacitive Humidity Sensor |
| title_full_unstemmed | Polyimide-Based Capacitive Humidity Sensor |
| title_short | Polyimide-Based Capacitive Humidity Sensor |
| title_sort | polyimide based capacitive humidity sensor |
| topic | humidity sensor flat polyimide nanograss polyimide rough polyimide |
| url | http://www.mdpi.com/1424-8220/18/5/1516 |
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