Thin-Film Engineering of Mechanical Fragmentation Properties of Atomic-Layer-Deposited Metal Oxides

Thin-Film Engineering of Mechanical Fragmentation Properties of Atomic-Layer-Deposited Metal Oxides

Mechanical fracture properties were studied for the common atomic-layer-deposited Al<sub>2</sub>O<sub>3</sub>, ZnO, TiO<sub>2</sub>, ZrO<sub>2</sub>, and Y<sub>2</sub>O<sub>3</sub> thin films, and selected multilayer combination...

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Bibliographic Details
Main Authors:	Mikko Ruoho, Janne-Petteri Niemelä, Carlos Guerra-Nunez, Natalia Tarasiuk, Georgina Robertson, Aidan A. Taylor, Xavier Maeder, Czeslaw Kapusta, Johann Michler, Ivo Utke
Format:	Article
Language:	English
Published:	MDPI AG 2020-03-01
Series:	Nanomaterials
Subjects:	atomic layer deposition crack onset strain fracture mechanics interfacial shear strain residual strain saturated crack density al<sub>2</sub>o<sub>3</sub>-y<sub>2</sub>o<sub>3</sub>-zro<sub>2</sub>-tio<sub>2</sub>-zno nanolaminate uniaxial tensile strain
Online Access:	https://www.mdpi.com/2079-4991/10/3/558

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