Surface Modification of Electroosmotic Silicon Microchannel Using Thermal Dry Oxidation

Surface Modification of Electroosmotic Silicon Microchannel Using Thermal Dry Oxidation

A simple fabrication method for the surface modification of an electroosmotic silicon microchannel using thermal dry oxidation is presented. The surface modification is done by coating the silicon surface with a silicon dioxide (SiO2) layer using a thermal oxidation process. The process aims not onl...

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Bibliographic Details
Main Authors: Tuan Norjihan Tuan Yaakub, Jumril Yunas, Rhonira Latif, Azrul Azlan Hamzah, Mohd Farhanulhakim Mohd Razip Wee, Burhanuddin Yeop Majlis
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Micromachines
Subjects:
surface modification
electroosmotic flow
microfluidic
silicon nanochannel
thermal oxidation
Online Access:http://www.mdpi.com/2072-666X/9/5/222

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