Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film

Abstract Owing to excellent performance and a simple mechanism, stretchable piezoresistive strain sensors have been applied to human skin for monitoring physical activities, physiological activities, etc. However, it is still a challenge to simultaneously realize highly sensitive and stretchable pie...

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Main Authors: Miao Kong, Zhao Xiang, Xinyu Xu, Shuguang Ma, Cai Chen, Xiaolong Wang, Kan Li, Deyuan Wei
Format: Article
Language:English
Published: Wiley-VCH 2023-08-01
Series:Advanced Electronic Materials
Subjects:
Online Access:https://doi.org/10.1002/aelm.202300197
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author Miao Kong
Zhao Xiang
Xinyu Xu
Shuguang Ma
Cai Chen
Xiaolong Wang
Kan Li
Deyuan Wei
author_facet Miao Kong
Zhao Xiang
Xinyu Xu
Shuguang Ma
Cai Chen
Xiaolong Wang
Kan Li
Deyuan Wei
author_sort Miao Kong
collection DOAJ
description Abstract Owing to excellent performance and a simple mechanism, stretchable piezoresistive strain sensors have been applied to human skin for monitoring physical activities, physiological activities, etc. However, it is still a challenge to simultaneously realize highly sensitive and stretchable piezoresistive strain sensors with high optical transparency. This study reports a transparent and stretchable piezoresistive strain sensor with 2D surface buckling by fabricating ultrathin indium tin oxide (ITO) film on the biaxially pre‐stretched polyacrylate (VHB) elastomer followed by pre‐stretch releasing. To the authors' knowledge, semiconductors are applied for a stretchable piezoresistive strain sensor for the first time. Furthermore, this strain sensor exhibits a high sensitivity of 569, a high transparency of 88% and a high biaxial stretchability of 110% at the same time. This device demonstrates the good long‐term stability over 500 stretching–relaxing cycles. The high sensitivity can be mainly attributed to the piezoresistive effect of the semiconductor where carrier mobility and the resulting resistivity can be significantly changed by the strain. The strain sensors attached to human skin are used to monitor many human motions such as chewing, swallowing, breathing, and walking. ITO‐based strain sensors pave the way toward the development of highly stretchable and sensitive wearable electronics.
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spelling doaj.art-7359b59454ea42c7978b609fa38c36282023-08-11T02:16:17ZengWiley-VCHAdvanced Electronic Materials2199-160X2023-08-0198n/an/a10.1002/aelm.202300197Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide FilmMiao Kong0Zhao Xiang1Xinyu Xu2Shuguang Ma3Cai Chen4Xiaolong Wang5Kan Li6Deyuan Wei7College of Science Zhejiang University of Technology Hangzhou 310023 ChinaCollege of Science Zhejiang University of Technology Hangzhou 310023 ChinaCollege of Science Zhejiang University of Technology Hangzhou 310023 ChinaCollege of Science Zhejiang University of Technology Hangzhou 310023 ChinaCollege of Science Zhejiang University of Technology Hangzhou 310023 ChinaCollege of Science Zhejiang University of Technology Hangzhou 310023 ChinaCollege of Science Zhejiang University of Technology Hangzhou 310023 ChinaAnalytical CenterHubei Jiufengshan LaboratoryWuhan 430206 ChinaAbstract Owing to excellent performance and a simple mechanism, stretchable piezoresistive strain sensors have been applied to human skin for monitoring physical activities, physiological activities, etc. However, it is still a challenge to simultaneously realize highly sensitive and stretchable piezoresistive strain sensors with high optical transparency. This study reports a transparent and stretchable piezoresistive strain sensor with 2D surface buckling by fabricating ultrathin indium tin oxide (ITO) film on the biaxially pre‐stretched polyacrylate (VHB) elastomer followed by pre‐stretch releasing. To the authors' knowledge, semiconductors are applied for a stretchable piezoresistive strain sensor for the first time. Furthermore, this strain sensor exhibits a high sensitivity of 569, a high transparency of 88% and a high biaxial stretchability of 110% at the same time. This device demonstrates the good long‐term stability over 500 stretching–relaxing cycles. The high sensitivity can be mainly attributed to the piezoresistive effect of the semiconductor where carrier mobility and the resulting resistivity can be significantly changed by the strain. The strain sensors attached to human skin are used to monitor many human motions such as chewing, swallowing, breathing, and walking. ITO‐based strain sensors pave the way toward the development of highly stretchable and sensitive wearable electronics.https://doi.org/10.1002/aelm.202300197bucklingelectronic skinspiezoresistive sensorsstrain sensorsstretchable electronicswearable electronics
spellingShingle Miao Kong
Zhao Xiang
Xinyu Xu
Shuguang Ma
Cai Chen
Xiaolong Wang
Kan Li
Deyuan Wei
Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film
Advanced Electronic Materials
buckling
electronic skins
piezoresistive sensors
strain sensors
stretchable electronics
wearable electronics
title Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film
title_full Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film
title_fullStr Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film
title_full_unstemmed Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film
title_short Transparent and Stretchable Piezoresistive Strain Sensors with Buckled Indium Tin Oxide Film
title_sort transparent and stretchable piezoresistive strain sensors with buckled indium tin oxide film
topic buckling
electronic skins
piezoresistive sensors
strain sensors
stretchable electronics
wearable electronics
url https://doi.org/10.1002/aelm.202300197
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AT xinyuxu transparentandstretchablepiezoresistivestrainsensorswithbuckledindiumtinoxidefilm
AT shuguangma transparentandstretchablepiezoresistivestrainsensorswithbuckledindiumtinoxidefilm
AT caichen transparentandstretchablepiezoresistivestrainsensorswithbuckledindiumtinoxidefilm
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